二手 SIGMA Sputtering System #193698 待售

Roll to roll sputtering system 8 Ball Vacuum Chamber & Chassis (2) CTI Model 1020CP Cold Head Cryo Pump (2) CTI Model 1020R Compressors Leybold RuVac WS500 Roots Blower Sliding Door Face Plate Sputtering system: RF Matching Networks Mass Flow Controllers Web system: (4) Black Max Motors & Gearboxes (Unwind, rewind, drum and tension drive) Chilled Drum Drum Motor Stand Control system: Human Machine Interface (HMI) - An operator touch-screen for manual and automated operations HMI - A Eurotherm Drives touchscreen for web control Eurotherm Control Cabinet & Network General Control Panel Utilities and accessories: Chiller Air Compressor Cathode Cooling Water Manifold Flexible Electric Trunking Valving: Roughing Vent and interlocks Cryo gate Cryo throttle Regeneration Purge Gauges: Convection gauges (low mtorr range) Baratron gauges Ion gauges Hydrogen vapor pressure gauges Tension drive, load cells and amplifiers Drum rotation motor and gearbox Rewind and unwind motors Gas system and control PLC card Signal connections Auto pumping Rewind and unwind control Plasma treater Sputtering controls: manual, regulate and direct mode RF control, DC control Maintenance mode Missing parts: Leybold DK200 rough pump (rotary piston pump) DK200 Gearbox (2) Cryo Throttle Valves (Butterfly Valves) (1) Cryo-pump gate valve (2) Hydrogen Vapor Pressure Gauges Ion Gauge Baratron Gauge (4) Convectron Gauges (6) Pneumatic Valves (regeneration valves for cryo pumps; purge valves for cryo pumps, rough pump Vent valves) Chamber Connecting Flange for Drum Feed-through Tension Roller Feed-through Unwind/Rewind Feed-through (6) DC Cathodes (40” x 6”) (6) MDX 5 KW sputtering power supplies Gas Control System Gas Lines (3) Load cells (3) Load Cell Amplifiers (1) Unwind/Rewind Shafts Steel Pressure Plate for Floor Gantry System and Crane (parts missing) Door Drive Train Side Steps to gain access to Cathodes Steel Ladder Mezzanine 480 V, 3 phase, approx. 1,000 A.