用 AMAT / APPLIED MATERIALS Mesa #9295107 待售的

ID#: 9295107

模型:

Mesa

晶圓尺寸:

8"

設備詳細信息:

CMP Cleaner, 8"
Main power box, 12"

Lower electronic:
Mega
System
Brush 1
Brush 2
SRD
Mega LDM

Brush module:
Brush Bath
Brush OP / Cis Cylinder
Sensor type
Motors

Brush LDM Direct type:
Valves
LDM Box and slide

SRD Module:
SRD Bath
Motor

Megasonic generator
Mega heater
Fan filter unit
Walking beam
Cover door pin and Interlock switch

Other sensors:
Wafer present sensor
Level sensor
Leak sensor
OP Sensor
CLS Sensor

Air fitting:
Lower electronic air tubing assy fitting
Check air fitting

Cables:
Walking beam lower electric cable
Brush lower electric cable
SRD Lower electric cable.
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