二手 AMAT / APPLIED MATERIALS Mirra 3400 #9411057 待售

CMP System Wet robot Wet queue tank: Q-Tank with lift System skins: Clear skins Load cup: Full contact HCLU Performance enhancement: Pad conditioner head 1-3 with screw type DDF3 Factory interface: Platen 1 ISRM: Legacy Platen 2 ISRM: Legacy Platen 3 ISRM: Legacy SECS GEM Interface Polisher: No polishing head 1-4 Upper Pneumatics Assembly (UPA): Profiler No UPA relocation Pad wafer loss sensor: Dual sensor No platen temperature control and cable No upper platen coating Grease platen gear assembly Slurry delivery: Peristaltic pump Standard slurry flow rate Slurry dispense arm: 4-Line slurry arm High pressure rinse DI Water Slurry tube Facilities operations: EMO guard ring No EMO IO System user and labels: English No LOTO Box Smoke detector Polisher slurry leak sensor Electrical requirements: Line frequency: 50 HZ Line voltage: 200/208 VAC Power lamp: Green lamp No power connected lamp Circuit breaker: 200 A Controller top panel: Holes punched out for AC Power cables entry No configurable IO GFI Type: 30 mA No isolation transformer Umbilical's: CAT Track style: Cascading Polisher to controller cable Controller to monitor cable: 50 feet Factory hookup: Upper exhaust Upper exhaust material: Stainless steel Lower exhaust Process exhaust: Vent interlock sensor No flange upper exhaust connection Drain manifold: 1 Line Operator interface: No Hard Disk Drive (HDD) Memory: 128M PIII CPU Operating system: Windows NT Polisher light tower: Pole mounted type Polisher tower: (3) Colors Lamp type: Incandescent Colors sequence: RYG Controller light tower: Pole mounted type (3) Colors Lamp type: Incandescent Color sequence: RYG 2001 vintage.