二手 AMAT / APPLIED MATERIALS Mirra Mesa #293627305 待售
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ID: 293627305
晶圓大小: 12"
優質的: 2001
CMP System, 12"
Copper processing system
(4) Two line peristaltic pumps
(2) Slurry arm left arms
No polishing heads
Wet robot:
Wafer handler
Eject vacuum
Missing parts:
Controller boards
(4) UPA Zone
UPA Rotary union
HCLU
Upper and lower platens
Mega brush
Mega generator and chemical vessels
Brush:
Pressurised vessels
(4) Vessels
Qty / Part number / Description
(1) / - / Megasonic RF Generator
(4) / - / Cleaner mega, brush1 and 2 chemical vessels
(4) / 0010-03697ER / Head sweep motors
(1) / 0010-37905 / i-Scan Endpoint
(2) / 0010-77428 / Assy, teflon coated upper platens
(2) / 0020-77924 / Bearing retainers
(4) / 0020-79068 / AMAT Brackets
(4) / 0021-77866 / Clamp drive spindles
(4) / 0021-77867 / Plate adapter motor spindle flex clamp kits
(1) / 0021-78095 / Manifold-II series valve, UPA Assy
(1) / 0021-78097 / Manifold-I valve, UPA Manifold assy
(1) / 0040-77085 / Lower platen
(4) / 0040-77461 / Spindle assys
(4) / 0090-06473 / Assy, wafer loss sensors
(4) / 0090-07553 / Assy, wafer loss sensors
(4) / 0090-77262 / UC Pressure tranducerassys
(4) / 0090-77263 / IC Pressure transducers -14.7 to 10
(4) / 0090-77297 / PP Pressure transducers -14.7 to 10
(4) / 0090-77298 / RR Pressure transducers -14.7 to 15
(4) / 0100-77043 / Dual slip out sensor boards
(4) / 0140-77491 / Cables, ER-44
(4) / 0140-77492 / Cables, ER-46
(4) / 0140-78202 / Cables, head pneumatic ER-45, UC
(4) / 0140-78203 / Cables, head pneumatic JD-SV43, SV45
(4) / 0140-78204 / Cables, head pneumaticjd SV43, SV43, SV45
(4) / 0140-78205 / Cables, head IC/IT JB-SV-46,47, SV43, SV45
(4) / 0140-78258 / Cables, head pneumatic EC/PP JA-SV-42, SV44
(4) / 0140-78261 / Cables, head pneumatic ER-42, EC/PP
(1) / 0140-03497 / Cables, platen 2 encoder
(4) / 0190-77116 / Flexible disks
(2) / 0240-77490 / Platen motors
(4) / 0760-01037 / CPLG Union rotary 4-port
(3) / 3870-02365 / Valve modules 8-PNEU
(1) / 3870-02366 / Valve module 8-PNEU
(1) / 0010-77157 / Load cup
(4) / 0190-14344R / Head rotation motors
(4) / 0190-14344 / NSK Driver, mega torque, with motor
(2) / 0190-14502 / MEI Motion control boards
(6) / 0190-14372 / DRVR Servopacks AC SGD, Power supply: 200 V, 100 W
(1) / 0190-19549 / Card P-M 1.6GHZ 512MB RAM VME Bus single
(1) / 0190-42525 / Network port server, EL160 (16) Channels, with PWRSP Power supply: 100-250 V AC, 50/60 Hz
(1) / 0100-01793 / PCB Assy, i/o interface board with COM
(3) / 0140-04819 / Cable bulkhead platenisrms
(1) / 0140-75170 / AMAT Head ROT 3 and 4 MP3-DVR 4 and 5
(1) / 0650-01088 / Transmitter
(2) / 0870-01013 / VEXTA Head Sweep drivers, 5-Phase
(4) / 1080-01166 / VEXTA Robot Z-W-S stepping motors, 2-Phase
2001 vintage.
AMAT/APPLIED MATERIALS/AKT Mirra Mesa設備是一種晶圓研磨、研磨和拋光系統,旨在提供高質量的晶圓表面,提高精度、重復性和吞吐量。該裝置旨在提高表面粗糙度和平坦度,同時也最大限度地減少缺陷。MA/AT提供手動和全自動配置,可根據用戶的需要提供靈活性和可擴展性。AKT Mirra Mesa Machine使用了一系列壓力和研磨工具以及化學和物理過程來實現所需的晶圓精加工。該刀具采用4軸運動,允許同時研磨和研磨整個晶片表面,從而提高速度和效率並最大限度地降低成本。MA/AT還使用壓縮空氣來保持磨料的狀態,並消除不需要的顆粒。AMAT Mirra Mesa Asset采用粒子計量技術改進過程，確保最佳結果和一致性。這些技術可以測量顆粒的參數，包括磨料的尺寸、形狀、硬度和接觸角。通過測量這些度量，MA/AT可以相應地調整工藝，確保最佳的光潔度和晶片質量。APPLIED MATERIALS Mirra Mesa模型基於一個模塊化平臺，可以定制以滿足用戶的需求。設備還可以配置各種晶圓尺寸和厚度。該系統易於安裝,易於維護,允許在運行過程中增加正常運行時間和減少停機時間。Mirra Mesa Unit也提供無塵的工作環境，不需要昂貴的潔凈間。總體而言,AMAT/APPLICED MATERIALS/AKT Mirra Mesa Machine是一種高度可靠的晶圓研磨、研磨和拋光工具,可提高速度、自動化和精度,從而生產出最優質的晶圓。它具有先進的粒子計量技術、模塊化平臺和易於維護的特點，是各種晶圓加工應用的理想解決方案。
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