二手 AMAT / APPLIED MATERIALS Mirra Mesa #9232538 待售

CMP System, 8" Technology: CMP STI Platform type: Mirra Mesa Wafer shape: Flat Application information: Application: Oxide System: Dry in / Dry out Device type: D-RAM Device geometry: 0.09 Microns Process materials: Polish slurry: STI Platen 1, 2 & 3 pad: IC1010 Pad conditioner: Diaphragm Pad conditioner head: DDF3 Pad conditioner holder Interface options: Cleaner type: MESA (Converted from Reflexion) Megasonics Robot type: AMAT / APPLIED MATERIALS In situ removal rate monitor: Digital SECS GEM Interface Cassette tank Cassette type: SMIF Type Installation type: Through the wall Integrated system basic FABS: FABS 212 Platen and head options: Polishing head: (4) TITAN I Heads (4) Retaining rings Pad wafer loss sensor Platen surface: Teflon coated Slurry delivery options: Slurry delivery: (2) Slurries by peristaltic pump Slurry flow rate: STD Flow Slurry flow monitor Slurry containment bulkhead: Single containment No slurry loop line Slurry dispense arm: Extended rinse arm No slurry leak detector DI Water High pressure rinse Mirra type Cleaner type: Mesa (Converted from Reflexion) Fabs type: SMIF Type Safety equipment: Red turn to release EMO button: STD EMO Guard ring System labels: English Smoke detector Umbilicals: Polisher to controller cable: 30 Ft Controller to monitor cable: 30 Ft Factory hookup: Standard upper exhaust Upper exhaust connection: 8" Drain manifold: 4 Line to Fac Drain adapter: NPT Fitting No castors for Mirra system Weight distribution plate (Skid pad) User interface: Gray area: Monitor Cleanroom: Monitor Class cart for monitor No class cart for (2) monitors No class 100 cart for (2) monitors Stainless cart Mouse / Trackball: PC Mouse No hard disk backup Polisher / Fabs light tower: Tower mounting type: (4) Lights Polisher tower: (4) Colors UPA Water fall Inter platen clean type with splash guard Polisher tower colors sequence: RYGB Cleaner option: Mesa cleaner Maintenance options: Single spray gun No lapping stone Special options: No nylon brush E-Chain teflon sheet: Water fall No low pressure release water Spares parts: Heads Retaining ring (2) Pad conditioner heads Mesa: Direct chem type: Megasonic module Brush 1 Brush 2 Standard: SRD Output station Electrical requirements: Line frequency: 50/60 Hz Line voltage: 200~230V Delta connection Power lamp: Green No power connected lamp Circuit breaker: 200A AC Outlet box: 100V No configurable I/O Wide type GFI: 50mA 1999 vintage.