二手 DISCO DFG 8540 #9138237 待售
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ID: 9138237
Wafer back grinder
Workpiece : Silicon wafer
Sample wafer provision : with (200mm)
Wafer thickness :
o 8"mm wafer
Thickness after processing : 100um, 200um,150um
o 6" wafer
Thickness after processing : < =300um
Protective tape
Wheel selection (for Z1:fine grinding) : BT 300
Wheel selection (self-grinding) : Disco suggestion
Dresser board :
Z1 wheel : Part no : DISCO
Z2 wheel : Part no : DISCO
Default cassette setting : Open flow (transfer to opposite cassette)
Stage A:
8" A192-80M
8" double slot cassette
sample of cassette
Stage B:
8" A192-80M
8" double slot cassette
sample of cassette
Adjustable cassette setting 1:
open flow(transfer to opposite cassette)
Stage A:
6" A194-60MB
6" double slot cassette
Sample of cassette
Stage B:
6" A194-60MB
6" double slot cassette
sample of cassette
Default display language : English
Z1
Height gauge stroke : 1.8mm(max.)
Z2
Height gauge stroke : 1.8mm(max.)
Power voltage
Power frequency : 60Hz
Attached hose : 5M
Safty lables : English
Paint color:
Cream
Standard color (munsell#2.5GY8.0/0.5)
Black
Standard color munsell#N 2.4
Manuals:
First set : English (for standard specification)
Second set : English (for standard specification)
Transport parts :
6" to 8"
Optional accessories (included with shipment) : 8" dedicated transport parts
Optional accessories (Thin grinding specification) : 6" decicated, 8" dedicated
Chuck table : Universal (4" to 8")
Wafer size selection for universal chuck table: 5",6",8"
Double slot cassette for thinly ground waters :
6" dedicated double slot cassette
8" dedicated double slot cassette
Lifting jig set
Power cable for main unit : with (5m/transformer for main unit is used)
Site-side piping joints : Including water temperature control unit (DTU152)
Automatic setup function
Transformer for main unit CM:with (voltage: 220 V)
Water temperature control unit (DTU152) : with (English manual attached)
Transformer for water temperature control unit : with (voltage :220 V)
Power cable for water temperature control unit: with (5m/transformer for DTU152 is used)
Duct unit
Uniterruptible power supply unit
Vaccum maintance function
Equip 8" & 6" wf thin grinding necessary parts
8" wf parts with shipment for main product
Capacity : 5 m3/min
2010 vintage.
DISCO DFG 8540是一款緊湊、功能豐富的晶圓研磨、研磨和拋光設備,旨在滿足半導體和光學行業的最大要求。這個強大的系統配備了先進的控制功能,能夠達到高達0.1um的精度水平,使其成為納米技術的完美工具。該單元的主要部件包括研磨拋光頭、研磨板和主體框架。磨頭由AccuForce-I磨削驅動馬達驅動,能夠以12,000 rpm的最大轉速旋轉。磨盤配有直接驅動電動機,能夠以高達10,000 rpm的速度旋轉,可重復精度高達0.1um。主體框架的設計使所有組件牢固地結合在一起,並設有一個集成的控制面板,可以方便地訪問所有的機器參數。該工具配有信號控制軟件包,便於資產操作和磨削及拋光過程的實時控制。它還具有用戶友好的圖形界面,實時顯示研磨和拋光狀態。後者便於全程監控,保持高質量的效果。該模型還能夠存儲和傳輸客戶數據,使其成為協作項目的理想工具。最後,DISCO DFG8540配備了幾個安全功能,包括磨削和拋光頭的雙層保護外殼,以及防止未經授權人員進入設備的安全門。這些特性結合其精確度和可靠性,使DFG 8540成為晶圓研磨、研磨和拋光應用的可靠工具。
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