二手 DISCO DFG 8540 #9138237 待售

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ID: 9138237
Wafer back grinder Workpiece : Silicon wafer Sample wafer provision : with (200mm) Wafer thickness : o 8"mm wafer Thickness after processing : 100um, 200um,150um o 6" wafer Thickness after processing : < =300um Protective tape Wheel selection (for Z1:fine grinding) : BT 300 Wheel selection (self-grinding) : Disco suggestion Dresser board : Z1 wheel : Part no : DISCO Z2 wheel : Part no : DISCO Default cassette setting : Open flow (transfer to opposite cassette) Stage A: 8" A192-80M 8" double slot cassette sample of cassette Stage B: 8" A192-80M 8" double slot cassette sample of cassette Adjustable cassette setting 1: open flow(transfer to opposite cassette) Stage A: 6" A194-60MB 6" double slot cassette Sample of cassette Stage B: 6" A194-60MB 6" double slot cassette sample of cassette Default display language : English Z1 Height gauge stroke : 1.8mm(max.) Z2 Height gauge stroke : 1.8mm(max.) Power voltage Power frequency : 60Hz Attached hose : 5M Safty lables : English Paint color: Cream Standard color (munsell#2.5GY8.0/0.5) Black Standard color munsell#N 2.4 Manuals: First set : English (for standard specification) Second set : English (for standard specification) Transport parts : 6" to 8" Optional accessories (included with shipment) : 8" dedicated transport parts Optional accessories (Thin grinding specification) : 6" decicated, 8" dedicated Chuck table : Universal (4" to 8") Wafer size selection for universal chuck table: 5",6",8" Double slot cassette for thinly ground waters : 6" dedicated double slot cassette 8" dedicated double slot cassette Lifting jig set Power cable for main unit : with (5m/transformer for main unit is used) Site-side piping joints : Including water temperature control unit (DTU152) Automatic setup function Transformer for main unit CM:with (voltage: 220 V) Water temperature control unit (DTU152) : with (English manual attached) Transformer for water temperature control unit : with (voltage :220 V) Power cable for water temperature control unit: with (5m/transformer for DTU152 is used) Duct unit Uniterruptible power supply unit Vaccum maintance function Equip 8" & 6" wf thin grinding necessary parts 8" wf parts with shipment for main product Capacity : 5 m3/min 2010 vintage.
DISCO DFG 8540是一款緊湊、功能豐富的晶圓研磨、研磨和拋光設備,旨在滿足半導體和光學行業的最大要求。這個強大的系統配備了先進的控制功能,能夠達到高達0.1um的精度水平,使其成為納米技術的完美工具。該單元的主要部件包括研磨拋光頭、研磨板和主體框架。磨頭由AccuForce-I磨削驅動馬達驅動,能夠以12,000 rpm的最大轉速旋轉。磨盤配有直接驅動電動機,能夠以高達10,000 rpm的速度旋轉,可重復精度高達0.1um。主體框架的設計使所有組件牢固地結合在一起,並設有一個集成的控制面板,可以方便地訪問所有的機器參數。該工具配有信號控制軟件包,便於資產操作和磨削及拋光過程的實時控制。它還具有用戶友好的圖形界面,實時顯示研磨和拋光狀態。後者便於全程監控,保持高質量的效果。該模型還能夠存儲和傳輸客戶數據,使其成為協作項目的理想工具。最後,DISCO DFG8540配備了幾個安全功能,包括磨削和拋光頭的雙層保護外殼,以及防止未經授權人員進入設備的安全門。這些特性結合其精確度和可靠性,使DFG 8540成為晶圓研磨、研磨和拋光應用的可靠工具。
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