二手 EBARA Frex 300 #9182740 待售
網址複製成功！
ID: 9182740
晶圓大小: 12"
CMP System, 12"
Components:
(1) Loadport (Foup): 1
(1) Loadport (Foup): 2
(1) Loadport (Foup): 3
(1) Loadport (Foup): 4
(1) Mainbody: Load unload unit
(1) Mainbody: Cleaner unit
(1) Mainbody: Polish unit: L
(1) Mainbody: Polish unit: R
(1) TCM & Noba monitor unit
(1) DHF Supply unit
(1) Power supply unit
(1) SC-1 Supply unit
(1) Slurry delivery unit
(1) Parts box: 1
(1) Parts box: 2
(1) Parts box: 3
(1) Parts box: 4
(1) Poli head: R
(1) Poli head: L
(1) Dresser: R
(1) Dresser: L
(1) Punching jig
(1) Poli jig
(1) Foot plates
(1) Cable pallet: 1
(1) Cable pallet: 2
(1) Cable pallet: 3
(1) Pipe: 1
(1) Pipe: 2
(1) Pipe: 3
(1) Pipe: 4
(1) Pipe: 5
(1) Roller tool
(1) Upside panel: 1
(1) Upside panel: 2
(1) Upside panel: 3
(1) Upside panel: 4
(1) Upside panel: 5
(1) Upside panel: 6
(1) Upside panel: 7
(1) Upside panel: 8
(1) Backside panel: 1
(1) Backside panel: 2
(1) Backside panel: 3
(1) Backside panel: 4
(1) Backside panel: 5
(1) Poli panel: 1
(1) Poli panel: 2
(1) Poli panel: 3
(1) Poli panel: 4
Parts box 1:
(1) Fitting jig
(1) Poli L,R Docking bolt
(1) Clean & poli docking bolt
(1) Poli L,R Shutter cover
(1) Poli & clean L,R Side cover
(1) Poli L,R Cooling water 1,2
(1) Poli L,R drain
(1) CL1 R-Side drain
(1) CL1 L-Side drain
(1) Poli L,R Side drain 1,2
(1) CL Drain pan drain
(1) CL R Side drain pan drain
(1) CL2 R Side drain
(1) CL2 L Side drain
(1) CL & EFEM Docking bolt
(1) CL 1,2 L Side
Parts box 2:
(2) Exhaust pipe
(1) Road cell
Parts box 3:
(1) Special jig
(1) Diar gage jig
(1) Pad jig
(2) Use the drive for the lift shaft
(1) Centol ling jig
(1) M6-11
(1) Sfc003610
(1) Sfc003615
(1) Position fixture
(1) 70735401
(1) C-6200-192
(9) Other parts
Parts box 4:
(1) Side panel-L braket
(1) Side Panel-R braket
(1) Side panel-L
(1) Side panel-R.
EBARA Frex 300是一種半導體晶圓研磨、研磨和拋光設備,用於直徑不超過6英寸的晶圓的受控背面加工。系統配備320毫米主磨輪、單軸伺服驅動單元，以及兩個6英寸真空卡盤。其獨特的研磨工藝利用金剛石砂輪，能夠調制切削深度、進料速率、密度等工藝因素，在晶圓上實現出色的平面化。該裝置采用獨特的磨輪設計，采用基臺銑削技術，在晶圓上提供均勻的接觸力，從而提高了磨削時間。研磨過程由直接驅動機器控制，該機器精確同步兩個6英寸真空卡盤。它采用低振動環路驅動工具，采用閉環自動伺服電機控制，根據樣本量優化研磨工藝。研磨工藝產生具有受控表面紋理的高品質表面光潔度，提供出色的平面度和特征定義。最後，在EBARA FREX-300的拋光輪上進行拋光過程，該拋光輪由ECU控制的直流伺服電機驅動。它能夠為特定的晶圓表面提供精確的壓力控制和動態性能。綜上所述，F-REX300是一個強大的晶圓研磨，研磨，拋光資產，提供卓越的平面和特征定義。由於其低振動環路驅動模型、ECU控制直流伺服電機和金剛石砂輪，它具有可靠的性能和精度。該設備是為滿足高精度半導體晶圓制造業的需求而設計的。
還沒有評論