二手 EBARA Frex 300 #9212102 待售
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ID: 9212102
CMP System
Qty Part description
(1) Cl1-l drain pipe
(1) Cl1-r drain pipe
(1) Cl2-r drain pipe
(1) Sponge holder assy (c)
(1) Sponge holder assy (d)
(4) Rubber seats
(4) Cross recessed head machine screws m2x8
(8) Cross recessed head screws m3x8
(4) Cross-recessed head screws m3x8
(4) Cross recessed head screws m3x8
(12) Cross recessed head screws m3x10
(14) Cross recessed head screws m3x16
(8) Cross recessed head screws m3x20
(4) Cross-recessed machine head screws m3x30
(4) Cross-recessed head screws m4x8
(4) Cross recessed head screws m4x10
(10) Cross recessed head screws m4x12
(6) Cross recessed head screws m4x15
(4) Cross recessed head screws m4x16
(6) Cross recessed head screws m4x25
(8) Cross recessed head screws m5x16
(4) Cross recessed head screws m6x15
(4) Cross recessed machine head screws m3x6
(8) Cross recessed head screws m3x8
(18) Cross recessed head screws m4x8
(3) Cross recessed head machine screws m4x10
(2) Hexagon socket headless set screws m3x5
(1) Hexagon socket set screw m4x10
(1) Hexagon socket headless set screw m5x6
(12) Cross hole truss small screws m3x4
(12) Cross recessed truss head screws m3x6
(14) Cross recessed truss head screws m3x10
(17) Cross-recessed truss head screws m4x6
(4) Cross recessed truss head screws m4x8
(20) Cross recessed truss head screws m4x10
(8) Cross recessed truss head screws m5x8
(9) Cross recessed truss head screws m5x10
(1) Joint bolt, roll
(8) Hexagon socket head cap screws m3x4
(9) Hexagon socket head cap screws m3x8
(12) Hexagonagon socket head cap screws m3x10
(1) Hexagon socket head cap screw m3x16
(6) Hexagon socket head cap screws m3x20
(2) Hexagon socket head cap screws m3x25
(4) Hexagon socket head cap screws m4x6
(22) Hexagon socket head cap screws m4x8
(11) Hexagon socket head cap screws m4x10
(4) Hexagon socket head cap screws m4x12
(24) Hexagon socket head cap screws m4x16
(1) Hexagon socket head cap screw m4x25
(8) Hexagon socket head cap screw m5x8
(2) Hexagon socket head cap screw m5x14
(32) Hexagon socket head cap screw m5x16
(2) Hexagon socket head cap screw m5x25
(3) Hexagon socket head cap screw m6x10
(14) Hexagon socket head cap screw m6x20
(4) Hexagon head bolt m4x10
(10) Hexagon head bolt m4x25
(2) Hexagon head bolt m5x10
(2) Hexagon head bolt m6x30
(3) Sp bolt
(1) Nut, cleaning arm (d)
(1) Nut, cleaning arm (c)
(2) Plate nut 300
(22) Plain washer m3
(35) Plain washer m4
(32) Plain washer m5
(1) Washer
(2) Weight case washer
(1) Washer
(2) Spring pin
(2) Spring pin 3x8
(2) Spring pin 4x12
(2) Pivot shaft
(1) Shaft
(1) Shaft, roll
(1) Parallel key 3x3x10
(1) Coupling
(2) Ball bearing
(1) Bearing ss6800zz
(4) Ceramic bearing, 6800
(2) Beariing (7000st)
(1) Timing belt
(2) Spring, nozzle, roll
(3) Spring
(2) O-ring p12
(1) O-ring p20
(1) O-ring g730
(12) O-ring s4
(5) O-ring s7
(2) O-ring s16
(1) O-ring s20
(2) O-ring s22
(1) O-ring s32
(1) O-ring s75
(1) O-ring s95
(1) O-ring s270
(1) O-ring s290
(3) O-ring as568a-216
(1) O-ring as568-#022
(1) Gasket, cover
(2) Gasket, d pan
(1) Seal assy
(1) Balance weight (ur)
(1) Cylinder
(1) Cylinder
(2) Handle
(2) Center nozzle
(4) Nozzle
(3) Latch
(3) Air cylinder
(1) Pfa tube
(1) Soft nylon tube
(4) Pliant tube (2)
(1) Joint (j) drain
(2) Pfa tube (4x3)
(5) Pvc saddle
(3) Ts-saddle 20a
(1) Reducing union tee adapter
(1) Piping adapter set
(2) Piping adapter l type
(4) Elbow union
(1) Elbow union
(1) Male elbow
(6) Union elbow
(8) Union elbow
(6) Union elbow
(8) Union elbow
(8) Reducing union elbow
(1) Quick connector socket
(1) Male branch tee
(1) Plug
(13) Plug
(12) Plug, seal retainer, w.r.
(2) Union
(1) Reducing union
(8) Half union
(1) Tube flange
(1) Flange (1), bellows
(1) Flange (2) bellows
(1) Air operated valve
(1) Air operated valve
(1) Block manifold (l)
(4) Speed control
(3) Regulator
(2) Regulator
(4) Block (2)
(1) Chuck arm (1)
(1) Chuck arm (2)
(1) Arm, ur
(2) Guide (1)
(1) Front cover (upper) 300
(1) Protector frame (l1)
(1) Bearing cover
(1) Belt cover
(1) Cable cover
(1) Cover, arm, ur
(2) Collar, brg (d10x5), rol.
(2) Collar, brg (d19x5), rol.
(1) Collar
(1) Collar, roll
(1) Collar, spd
(1) Cap
(1) Sco cap
(1) Bearing clamp
(1) Connector clamp
(3) Tube, clamp, drain
(1) Bearing case (1)
(1) Bearing case (2)
(1) Case, center nozzle, ur
(4) Chuck piece
(4) Saddle, tube and cable, catm
(3) Saddle, tube, arm
(2) Support, center nozzle, roll
(1) Pipe support (l)
(3) Hose support, chem
(2) Sco shim
(2) Sco shim
(2) Sco shim
(2) Sco shim
(1) Bellows, upper roll
(1) Block stage
(2) Stopper
(1) Plate, washer, arm
(4) Daistad
(1) Table assy
(1) Drain pan (j)
(2) Dry hand (1) 300
(1) Bracket
(1) Bracket (1) r
(3) Bracket (1)
(2) Weight case bracket
(1) Shaft bracket, ur
(1) Flange, seal, roll
(1) Motor bracket
(1) D/r plate
(2) Seal plate l1
(1) Seal plate l2-r
(1) Seal plate l2-l
(1) Plate, chem
(1) Sco plate
(1) Rod block
(1) Pipe block
(1) Base, loadcell, ur
(2) Holder, center nozzle, roll
(1) Holder (1), motor bracket
(4) Tube holder chem
(2) Holder, cable, arm
(1) Holder, seal, roll
(1) Rod end
(3) Sp washer
(1) Drive center
(2) Clip (ar19)
(2) Clip (wr10)
(6) Joiner set
(1) Pivot channel
(1) Screw, cleaning arm (d)
(1) Screw, cleaning arm (c)
(1) Tvme 3903v
(1) Tvme 3902v
(2) Uniwire board
(1) Amplifier
(1) Driver, sgdm-01bda
(1) Vacuum sensor amp
(1) Driver, sgdm-08ada
(1) Ac servo
(2) Controller mc001-tk
(1) Pressure sensor
(1) Fiber unit
(1) Power unit, digital epw-002
(1) Driver, asd13c-a
(1) Driver, asd13c-a
(2) Driver, asd13a-a
(1) Ac servo motor
(1) Ac servo motor
(1) Uni wire end unit
(1) Digital pressure monitor
(1) Load cell
(1) Flow meter
(1) Power terminal
(2) D/a converter
(1) Sticker
(1) Sticker
(2) Lamp, fluorescent, polisher
(1) Lamp, fluorescent, mini enviornment
(2) Glow lamp igniter
(2) Lamp, fluorescent, cleaner
Pins and connectors:
(100) / Connector pins (m) awg 26-20
(100) / Connector pins (m) awg 20-16
(100) / Connector pins (f) awg 26-20
(100) / Connector pins (f) awg 20-16
(20) 2 Pins, receptacle, elr-02v
(16) 3 Pins, receptacle, elr-03v
(20) 4 Pins, receptacle,elr-04v
(6) 6 Pins, receptacle, elr-06v
(24) 2 Pins, receptacle, elp-02v
(16) 3 Pins, receptacle, elp-03v
(20) 4 Pins, receptacle,elp-04v
(6) 6 Pins, receptacle, elp-06v.
EBARA Frex 300是一種自動化晶圓研磨、研磨和拋光設備，用於完成和拋光半導體晶圓。它旨在提供高精度和重復性，適合用於研發實驗室。EBARA FREX-300是一種精密的平板晶片研磨拋光機.它有一個從0-45度成角度的平整工件床，使樣品可以根據其大小水平或垂直處理。該機還采用獨特的兩位雙微研磨/拋光板系統，以確保均勻和均勻的加工。它還具有數字控制的原位樣品支架，以防止樣品在加工過程中運動。F-REX300是為靈活、安全、準確的操作而設計的。它總共配備了10種工藝參數的控制功能，包括研磨、研磨、拋光。此外，該單元連接到數據處理平臺，用於數據采集和分析過程中的性能參數。EBARA F-REX300還有一個全自動的樣品處理機，它是整個機器的組成部分。它有一個計算機控制的可移動裝載機，允許樣品在最小的監督和用戶幹預下從機器上裝卸。還提供了一個樣品運輸工具，用於將晶片往返裝載機。FREX-300設計為提供可靠的結果，最大粗糙度偏差為1 µm，以確保表面各向同性拋光。它可以加工各種不同的材料，不同的拋光規格，從光磨到高光澤拋光。而且，F-REX 300可以很容易地整合到標準晶圓處理系統上，例如金剛石拋光或蝕刻。這使其成為研發和生產環境的理想解決方案。EBARA還為機器提供生命周期和維護服務,確保Frex 300保持最佳服務。
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