二手 PETER WOLTERS / LAPMASTER microLine AC 2000-P2 #9352424 待售
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ID: 9352424
晶圓大小: 12"
優質的: 2007
Double side polishing machine, 12"
Wheel dimensions:
Outer: 1935 mm
Ring width: 686 mm
Thickness: 80 mm
Wheel distance: 190 mm With 80 mm wheel thickness
Pneumatic:
Maximum load pressure: 3500 daN
Compressed air: 6,5 Bar
Electronic equipment:
Servo drives digitally controller
Upper wheel: 46 kW/40 min⁻¹
Lower wheel: 46 kW/40 min⁻¹
Inner workpiece drive: 7,5 kW/min⁻¹
Outer workpiece drive: 7,5 kW/min⁻¹
Hold the drive aggregates for lower working wheel and workpiece drive
Electromechanical height adjustment for outer and inner pin ring
Splash guard pan
Assembly connections for easy access
Pneumatic load control
Interception device
Weighting device
Drives
Working wheels
Safety device
Corrosion resistant design
Electric switch cabinet (Air cooled)
CNC Controller
Operating panel
Polishing media connection and metering
Slurry distribution system
Polishing media collecting channel
Tool kit
Basical range of CNC control S7-400 with visualization
Pressure control via proportional valve and pressure sensor
Display of the actual pressure value
13-Pressure ranges
Variable speed of rotation change in each pressure range of each drive
Variable change of rotation direction
Automatic swiveling in / out
5-Conditioning program with recorded inception height
Alternative list for selective programming functions:
Swiveling device
Starting of the drives
Feeding of the polishing media
Wet mode
0020: Brush program
0030: Cooling water temperature monitoring
0040: Rinsing and spraying device (Chemical polishing)
0050: Spraying device
0060: Levelling device for horizontal adjustment of the upper working wheel
0070: Epicyclic work holder drive system
0080: (2) Polishing wheels
0090: Back up
Options:
0100: Power backup
0110: Polishing compound connection
0120: Cable identification
0130: Mixing block
0140: Taiwan electrics
Electrics: 460 V
UPS: 230 V
0150: Packing
0160: Commissioning
0170: Status light
0180: Loading counter
0190: Second hand operation station
0200: Shower guns for DI- Water
0210: (2) Heating / Cooling aggregate (WRK) 12760 W
0220: Heating / Cooling aggregate Heating possibility up to 55°C
0230: Fittings for cooling water circulation system with refrigeration unit
0240: 6-Step polishing program
0260: Fiberglas cable
0270: Separate drive security
0290: Signal tower with LED
0300: Indication of signal tower
0310: Upgrades
0320: 80-Polishing feed holes
0330: Anti-syphoning package
0340: Measuring device (Flatness)
0350: Distance block set
0360: Steel straight edge, 2000-0 mm
0370: Additional cable length
0380: Engineering costs
0390: PDR System
Power supply: 400 V + 6%-10% (Acc. DIN IEC 38)
Frequency: 50 Hz
Control voltage: 203 V / 24 VDC
2007 vintage.
PETER WOLTERS/LAPMASTER microLine AC 2000-P2是一種先進的晶圓研磨、研磨和拋光設備,用於多面、全自動晶圓加工。它提供了高度精確和均勻的大小不超過200毫米的大小晶片的制造。該系統采用先進的計算機控制機器人加載和定向裝置。這臺機器被設計成精確而一致地將晶片放置在研磨和拋光卷上的精確位置。高精度研磨/拋光磨輥安裝在旋轉卡盤中,以進行精確的角度調整,從而可以對晶圓進行非常精細的研磨和拋光。該工具使用精密金剛石磨料將晶片拋光至盡可能高的公差。它為平面和曲面提供了出色的表面光潔度和精度。機械研磨過程與計算機控制的資產相結合,保證了可重復的結果。該模型還配備了先進的晶圓測繪設備,以確保一致、精確的結果。晶圓映射系統采用精密激光傳感器和3D激光掃描儀。激光掃描儀從晶片上收集數據點,以創建晶片表面的詳細地形圖。這些數據被送入機器人單元,以準確定位和固定晶片進行研磨和拋光。LAPMASTER microLine AC 2000-P2還配備了高級後處理機。此工具自動收集和存儲最終研磨和拋光過程中的數據點,以確保可重復的結果。後處理資產還可以清除成品晶片中的任何毛刺、凹痕或其他缺陷。PETER WOLTERS microLine AC 2000-P2專為長期運行而設計,可輕松集成到現有晶圓處理系統中。它能夠處理直徑達200毫米的晶片,並在晶片研磨、研磨和拋光操作方面提供優異的效果。
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