二手 ADE / KLA / TENCOR UltraGage 9520 #9245050 待售

Dimensional measurement system ASC200 Controller included Thickness: ± 1.00µ Shape (Bow / Warp): ±( 3.00 + 5% of reading) µm ±( 4.00 + 5% of reading) µm Global flatness: ± 0.50 µm Integral wafer centering and pre-aligner Backside contacting chuck Vacuum chuck diameters: Small (23.3 mm): 3", 100 mm -150 mm wafers Large (33.4 mm): 125 mm- 200 mm wafers Wafer contact materials: Resting pads: Santoprene Vacuum chuck: Polyurethane Nominal wafer thickness range: 250 µm - 750 µm Auto-loader: Single / Dual cassette Sorting: Slot-to-slot / Cassette-to-cassette Backside contact, horizontal cassette orientation Wafer contact material: Teflon Nominal wafer thickness range: 250 µm - 750 µm Conductivity type: P / N Edge exclusion: Thickness: 3 mm / 5 mm Shape: 3 mm Nominal wafer thickness: 250 µm - 750 µm Resistivity: > 0.1-200 Ω cm Edge gradient: 0.1 µm/mm Power supply: Temperature range: 12.7°- 29.4° C (55° - 85° F) Relative humidity: 55 to 95% non-condensing Vacuum: 0.6 SCFM, 635 mm (25") Hg ± 10% Peak usage: 2.8 kVA Voltage: 100/120/200/208/220/230/240 VAC ± 10% 50/60 Hz, Single phase.