二手 ISIS SENTRONICS SemDex 301-34 #9129394 待售
看起來這件物品已經賣了。檢查下面的類似產品或與我們聯系,我們經驗豐富的團隊將為您找到它。
單擊可縮放
已售出
ID: 9129394
優質的: 2013
Wafer metrology system
Maximum accessible diameter: 210 mm (StraDex a3-50)
Accessible rotation: 90° / 180°
Auto focus
StraDex a3 - 50 (Precision mechanical bearing)
StraDex f24 - 300 (Airbearing)
Antivibration plate below chuck
Optical wavelengths:
StraDex a3 - 50: ~500 nm (Maximum height evaluation 120 μm)
StraDex f24 - 300: 1300 nm (Minimum silicon thickness 10 μm)
(2) Calibrated silicon objects:
123 μm thick plate with 10 nm roughness
300 μm thick plate with 1 nm roughness
Technical specifications:
Sensor system:
StraDex a3 - 50 (top left):
Field-of-view: (0.35 mm)^2
Lateral pixel size: 0.35 μm
Working distance: 3.5 mm
Auto-focus range: 4 mm
Maxmimum warp: <3 mm
Maximum Z-height: 60 μm (High-resolution ) / 120 μm
Repeatability (high-resolution): 0.5 nm (In-plane), 3 nm (step)
Total acquisition time: Type 4 seconds, 1 seconds (Reduced FOV)
Maximum focusing speed: 200 pm/s
StraDex f24 - 300 (Top & Bottom center):
Spot size: 24 μm
Auto-focus range: 24 - 44 mm
Maximum warp: 1.5 mm
Maximum acquisition rate (Fast mode): 4 kHz
Thickness (Silicon):
10-350 μm (Fast mode)
10 - 800 μm (Slow mode)
Thickness (Glass, Polymer):
20 - 750 μm (Fast mode)
20 - 1000 μm (Slow mode)
Acquisition rate: <4 kHz
Accuracy and repeatability conditions:
Surface roughness Rz < 0.1 μm
Confidence range: 2 Sigma
Thickness sensor (Stradex f24 - 300) performance:
Absolute accuracy: < +/- 0.5 μm
Repeatability (fast mode): < +/- 0.1 μm
Repeatability (slow mode): < +/- 0.5 μm
Stage:
Maximum X / Y Travel range: 300 x 300 mm^2
Maximum velocity: 30 mm/s
Lateral accuracy: 2 μm
Maximum height variation repeatable: 2 μm
Free positioning via keypads
Anti-vibration table
Air suspension
Perforated vacuum:
Chuck for double side (Swiss cheese)
Unframed and framed wafers for 6"-12"
Inter-center spacing: 10 mm Holes at 20 mm
Vacuum for wafer suction (6 Bar air pressure required)
Computer: Intel i7 with screen
(2) HDD Raids
With (2) 1TB
Fan filter unit: ISO Class 10
Housing: White powdered coating
Data interface: LAN
Temperature: 10°C-35°C
Power supply: 100-240 V, 50-60 Hz, 3kW
Barcode scanner
Barcode and recipe
SECS/GEM Extension:
SEMI (E 30, E 37, E 5) Includes
Recipe handling (RMS)
2013 vintage.
ISIS SENTRONICS SemDex 301-34是為半導體生產、檢驗和封裝應用而設計的晶圓測試和計量系統。它由專門為半導體工業開發的先進光學傳感和檢查系統提供動力。它為缺陷檢測、地形分析、電氣表征、叠加和位置定位以及2D/3D晶圓檢測提供了集成解決方案。SemDex 301-34具有多種雕刻和掃描技術來執行過程和計量操作。該單元配備了全套車載成像工具，包括一系列激光、線路掃描和AutoTrack相機。集成了一個正在進行的電氣測試系統，允許實時報告測試設備的電氣參數。ISIS SENTRONICS SemDex 301-34提供了詳細的模具映射功能，允許用戶準確驗證所有缺陷的位置。各種高速掃描模式可用於準確表征整個晶片，而高分辨率成像工具甚至可以檢測到最小的缺陷。無論晶片條件如何,該單元都能提供優異的結果,並且能夠檢查任何大小、形狀和厚度的晶片。SemDex 301-34還具有強大的Overlay和Offset管理功能。實時偏移分析儀提供低至5納米的覆蓋範圍測量，以保證晶圓在掃描過程中的精確對準。為快速、自動化缺陷評估和數據分析提供了批量檢測和模式識別功能。ISIS SENTRONICS SemDex 301-34是用於半導體測試、檢查和封裝需求的功能強大且可靠的工具。它強大的設計和先進的能力使其適合廣泛的應用，從簡單的模具檢查到復雜的過程和計量操作。SemDex 301-34可用於在半導體領域實現更高的收益率，降低成本，並保證最大質量保證。
還沒有評論