二手 KLA / TENCOR 6220 Surfscan #9194019 待售

Automatic surface inspection system Bare wafer surface defect inspection system Left side: 4"/6" wafers Right side: 2"/3" wafers Thickness: SEMI Standard wafer thickness Throughput: 100 wph (200 mm) at 0.12 mm Illumination source: 30 mW Argon-Ion laser / 488 nm Wavelength Operator interface: Mouse / Dedicated user keypad Operations manual / Documentation Material: Any opaque Polished surface (Scatters less than 5 percent of incident light) Defect sensitivity: Micrometer diameter: 0.09 PSL Sphere equivalent (>80 percent capture rate (0.112um @ 90%)) Repeatability: Count repeatability: <0.5 percent at 1 standard deviation Mean count: >500, 0.364 mm Diameter / Latex spheres Accuracy: Count accuracy better than 99 percent VLSI Standards relative standard Contamination (Per single pass): <0.005 particles/cm² >0.15 mm diameter Cassette handling: Single puck wafer handling from two cassettes Sender / Receiver Receiver.