二手 KLA / TENCOR AIT UV #9211161 待售

Wafer inspection system Assy pillar AIT-UV Raid array: (3) Hard disks Robot type: BROOKS / PRI AUTOMATION ATM207-2-S-CE Controller type: PRI ESC-212B Setup disk P/N: 524140 PO Configuration: AIT-Fusion UV final assy group Advanced collection optics configuration with UV illumination Adaptive mode Technology: Multi-spot optics: 2.2um,3.5 um and 5.0um Spot sizes Automatic coordinate registration and alignment Region based multi-threshold capability (RBMT) Core technology Package AIT Standard detection algorithms Advanced detection algorithms HLAT Channel merge Run time alignment iADC and RTC Real time classification systems Run time sampled image acquisition Internal optical review microscope: Includes: (5) Microscope review objectives: 5x, 10x, 50x, 100x, 150x Bright field and dark field review modes Autofocus capability Integrated ULPA filter package High resolution color flat panel display Supports LAN connectivity over 10/100 Base-T and BNC (10 Base-2) connectors Operations / Reference manual KLARF File output External panels, cleanroom white HSMS Interface Signal tower (4) Colors: RYGB, standard mount 8" Real time classification (RTC) package Options: Art dual open handler, 8" iADC Option Power supply: 208V, 3-Phase WYE Short circuit load: 65kVA @ 208V Full load: 75A Operating system: Windows NT 4.0 file and printer connections (Supports).