二手 WYKO / VEECO NT 3300 #9304712 待售
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ID: 9304712
優質的: 2004
Optical 3D surface profiler
Measurement technique:
Optical phase-shifting
White light vertical scanning
Interferometry
Measurement capability:
Three-dimensional
Non-contact
Surface profile measurements
COHU 1100 Analog camera
With digital interface board
Digital swap compatible res for 3300: 6612
Camera array size for 3300: 640 x 480
Upgraded LED for 3300
Objectives: 1.5x, 2x
Measurement array:
Maximum array: 736 x 480
Standard: 1000 x 1000
Light source: Tungsten halogen
Lamp: Automated filter selection
Stages:
Manual: ± 2"
X/Y Translation: 200 mm (± 50.8 mm)
Rotation: ± 90°
Tip / Tilt: ± 6°
Options:
Automated: ± 4" (101.6 mm)
X/Y Translation
Automated R/f
Rotation: 360°
Radius: 4" / 8" (101.6 mm / 203.2 mm)
Tip / Tilt head: Motorized / Automated
Optical assembly:
Integrated
Computer-controlled illuminator
Automated discrete zoom with magnification sensing
Automated stages
Closed-loop precision vertical scanning assembly
RS170 Video display: 230 mm
PC Computer
Processor: Pentium
SVGA Monitor, 17" (430 mm)
Live image stays up on SVGA through measurement
Processor: G5
Computer: Windows XP
(24) Monitors
Advanced analyzer
Stitching
Fast automation
GALIL 4-Axis controller
Stage: 8 x 8
Motorized nosepiece
With objective: 5x, 50x
LED Illumination
Performance:
Vertical measurement range:
Standard: 0.1 nm to 1 mm
Vertical resolution: <1A Ra
RMS Repeatability: <0.01 nm
Scan speed:
Standard: Up to 7.2 µm/sec (288 µin./sec)
Lateral spatial sampling: 0.08 to 13.1 µm
Field of view: 8.24 mm to 0.05 mm
Maximum slope: 25° to 1.8°
Reflectivity: 1% to 100%
Environment:
Temperature range: 15° to 30°C (59°F to 86°F)
Non-condensing humidity range: <80%
Power requirements:
Compressed air: 60 - 100 PSI
Input voltage: 100-120 VAC / 200-240 VAC, 50/60 Hz
Power consumption: <300 W
With stage: <400 W
2004 vintage.
WYKO/VEECO NT 3300是一種晶圓測試和計量設備,用於檢查晶圓和其他薄膜材料的結構和質量。該系統包含各種專門的組成部分,允許對各種樣本類型進行分析。WYKO NT 3300可以進行空間和角度精度分別為1 μ m和0.1°的測量,並且可以測量直徑最大為300 mm的晶圓。該裝置提供各種先進的成像技術,用於檢查厚度不超過50 μ米的薄膜裝置。成像選項基於一系列能夠在各種照明條件下捕捉圖像的高精度相機。例如,機器可以從brightfield切換到darkfield成像,從而可以檢測否則可能不可見的缺陷。此外,它還能夠以紫外線和紅外線等不可見波長進行掃描,從而更全面地覆蓋樣品表面。VEECO NT 3300擁有高速、高分辨率顯微鏡。它的設計包括電動精密級和自動聚焦技術,允許樣品在任何給定位置快速移動或聚焦。該工具還與一系列不同的光學設備兼容,使用戶可以選擇每個測量和成像任務的最佳放大倍數。除了成像能力外,NT 3300還具有先進的分析工具,包括表面剖面儀和三維成像工具。剖面儀以極高的精度測量表面地形的輪廓,允許用戶評估表面粗糙度和其他樣品細節。三維成像技術使樣本特征在多個軸向平面上可視化。總之,WYKO/VEECO NT 3300是晶圓測試和計量的一種強大而通用的資產。其精確的成像和分析工具提供了對樣品結構和質量的準確和詳細的見解,從而能夠檢測和優化缺陷以及與過程相關的問題。
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