二手 WYKO / VEECO NT 3300 #9304712 待售

ID: 9304712
優質的: 2004
Optical 3D surface profiler Measurement technique: Optical phase-shifting White light vertical scanning Interferometry Measurement capability: Three-dimensional Non-contact Surface profile measurements COHU 1100 Analog camera With digital interface board Digital swap compatible res for 3300: 6612 Camera array size for 3300: 640 x 480 Upgraded LED for 3300 Objectives: 1.5x, 2x Measurement array: Maximum array: 736 x 480 Standard: 1000 x 1000 Light source: Tungsten halogen Lamp: Automated filter selection Stages: Manual: ± 2" X/Y Translation: 200 mm (± 50.8 mm) Rotation: ± 90° Tip / Tilt: ± 6° Options: Automated: ± 4" (101.6 mm) X/Y Translation Automated R/f Rotation: 360° Radius: 4" / 8" (101.6 mm / 203.2 mm) Tip / Tilt head: Motorized / Automated Optical assembly: Integrated Computer-controlled illuminator Automated discrete zoom with magnification sensing Automated stages Closed-loop precision vertical scanning assembly RS170 Video display: 230 mm PC Computer Processor: Pentium SVGA Monitor, 17" (430 mm) Live image stays up on SVGA through measurement Processor: G5 Computer: Windows XP (24) Monitors Advanced analyzer Stitching Fast automation GALIL 4-Axis controller Stage: 8 x 8 Motorized nosepiece With objective: 5x, 50x LED Illumination Performance: Vertical measurement range: Standard: 0.1 nm to 1 mm Vertical resolution: <1A Ra RMS Repeatability: <0.01 nm Scan speed: Standard: Up to 7.2 µm/sec (288 µin./sec) Lateral spatial sampling: 0.08 to 13.1 µm Field of view: 8.24 mm to 0.05 mm Maximum slope: 25° to 1.8° Reflectivity: 1% to 100% Environment: Temperature range: 15° to 30°C (59°F to 86°F) Non-condensing humidity range: <80% Power requirements: Compressed air: 60 - 100 PSI Input voltage: 100-120 VAC / 200-240 VAC, 50/60 Hz Power consumption: <300 W With stage: <400 W 2004 vintage.
WYKO/VEECO NT 3300是一種晶圓測試和計量設備,用於檢查晶圓和其他薄膜材料的結構和質量。該系統包含各種專門的組成部分,允許對各種樣本類型進行分析。WYKO NT 3300可以進行空間和角度精度分別為1 μ m和0.1°的測量,並且可以測量直徑最大為300 mm的晶圓。該裝置提供各種先進的成像技術,用於檢查厚度不超過50 μ米的薄膜裝置。成像選項基於一系列能夠在各種照明條件下捕捉圖像的高精度相機。例如,機器可以從brightfield切換到darkfield成像,從而可以檢測否則可能不可見的缺陷。此外,它還能夠以紫外線和紅外線等不可見波長進行掃描,從而更全面地覆蓋樣品表面。VEECO NT 3300擁有高速、高分辨率顯微鏡。它的設計包括電動精密級和自動聚焦技術,允許樣品在任何給定位置快速移動或聚焦。該工具還與一系列不同的光學設備兼容,使用戶可以選擇每個測量和成像任務的最佳放大倍數。除了成像能力外,NT 3300還具有先進的分析工具,包括表面剖面儀和三維成像工具。剖面儀以極高的精度測量表面地形的輪廓,允許用戶評估表面粗糙度和其他樣品細節。三維成像技術使樣本特征在多個軸向平面上可視化。總之,WYKO/VEECO NT 3300是晶圓測試和計量的一種強大而通用的資產。其精確的成像和分析工具提供了對樣品結構和質量的準確和詳細的見解,從而能夠檢測和優化缺陷以及與過程相關的問題。
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