二手 DNS / DAINIPPON SU-3000 #293809737 待售

Wafer cleaner, 12" (4) Chambers (4) Chemical cabinets: NH4OH, BHF, IPA (2) Handling systems Overhead transport system Indexer unit (4) Load ports YASUKAWA XU-ACT153L-B01 ID/R Unit Transfer unit YASUKAWA XU-RC615L-A12 CR Unit Fan Filter unit (FFU): Type: 2T-445950GGE-SWALY Material: Fluoridation resin filter Capacity: 99.995 <% / 0.1 μm Range: 0~0.4 m/sec and 0~0.6 m/sec Process chamber: (4) MPC Chambers Shield plate: Shield plate IPA Dispense: IPA Shield plate DIW Dispense: CO2 Water Shield plate nozzle drain: CO2 Water Shield plate nozzle drain: IPA Scan nozzle 1: Chemical 2 Dispense: DHF DIW Dispense: CO2 Water Chemical 4 Dispense: Bulk HF Port 20 DHF reclaim line valve open: DHF Port 21 ACID drain line valve close: Acid Port 20 N2 Purge Chemical 2 Nozzle drain: DHF DIW and chemical 4 nozzle drain: CO2 Water and bulk HF Scan nozzle 2: DIW Dispense: CO2 Water Nano spray: N2 Nano spray DIW Dispense: CO2 Water Nano spray chemical 3 dispense: SC-1 Nano nozzle 2 chemical 3 dispense: SC-1 Nano spray composite: N2 and CO2 Water Nano spray composite: N2 and SC-1 Scan nozzle 2 chemical 3 nozzle drain: SC-1 Backside nozzle: Chemical 2 dispense: DHF Chemical 3 dispense: SC-1 DIW Dispense: CO2 Water Backside nozzle 5 Chemical 4 Dispense: Bulk HF Backside umbrella nozzle dispense: CO2 Water Backside nozzle pre dispense Backside nozzle drain Fixed nozzle: Chuck rinse nozzle dispense: CO2 Water Spin base rinse nozzle dispense: CO2 Water Shield plate surface rinse nozzle Dispense: CO2 Water Fixed nozzle dispense: CO2 Water Spin base: Material: PCTFE Spin motor: AC Servo motor Maximum revolution: 3000 RPM Maximum acceleration: 1000 RPM/sec Revolution accuracy: ±3 RPM (at 3000 RPM) Chuck: Chuck drive: Pulse motor Material: PCTFE, ETFE Wafer detection: Detection by chuck pins Shield plate: Material: HT-PVC Revolution drive: AC Servo motor Maximum revolution: 3000 RPM Maximum acceleration: 1000 RPM/sec Revolution accuracy: ±3 rpm (at 3000 RPM) Up / Down shift: AC Servo motor Minimum distance to the wafer surface: 0.3 mm Splash guard: Chemical collection structure Material: PTFE Up / Down shift: AC Servo motor Shutter: Drive: Air cylinder (2) Chemical cabinets Temperature control of low temperature Chemical used: HF, NH4OH, IPA Chemical mixing ratio: Premix Range of temperature control: 20°C~35°C Chemical filter: Chemlock housing, 0.1 μm Circulation pump: Pillar KOMATSU NES-2123-7 Circulator KOMATSU GRS-612 Temperature controller E-Flow: Module: SD16L-24S W HORIBA OE-960CE Resistivity meter Resistivity sensor: ESD-001C-T Sensor cable: CK-10M Sensor holder: EFA-30 Relay: MY2N-CR DC24V Fire extinguisher controller: Auto pulse 542R 2008 vintage.