二手 NAURA / AKRION Global Advanced Modular Automated (GAMA) #293712220 待售

ID: 293712220
優質的: 2021
Wet bench Front-Mounted Process Robot End-Effector Kel-f (PCFE) Controller Transfer robot Common I/O Station - Right hand Wafer transfer system: SMIF Capable Dual buffer queues (8) PFA Cassettes, 8" Wet process models: BOE (Premix), 18" (2) Recirculated PVDF Tank / Auto lid Bulk-Fill premixed BOE Faculty Temperature: 22°C ± 0.3°C No chemical concentration controls Inline Teflon heater / Heat exchanger at 16°C ± 1.0°C Teflon pump Float level sensor Direct drain QDR, 18" (2) Natural poly pro quick dump rinse tank Flow Indicator, 0-10gpm Ambient rinse - Spray bars Dump / Cascade overflow rinse cycles Flush during idle state N2 Backpressure level sensor Rinse resistivity Reclaim drain TMAH, 18" (2) PFA Tank / Auto Lid and Fume Capture TMAH Weight bulk fill facility 2.35% Single HDPE Gravity dispense vessel PFA Nuts, Recirc loop lines Temperature: 22°C ± 10.3°C Inline Teflon heater / Heat exchanger: 16°C ± 1.0°C Teflon pump tachometer Ni backpressure level sensor Direct drain EWO, 14" Wash dry plenum Dl Rinse / Ultra-Pure nitrogen dry cycles Rinse matrix-based robot movement Front rear Dl Spray gun Hand aspirator tool wide plenum Reclaim drain HCI, 18" (2) Recirculated PVDF Tank auto lid / Fume capture Bulk-Fill HCI Supply line HDPE Gravity dispense vessel HCI Mixing ratio: HCI to Dl No chemical concentration controls Temperature: 22°C ± 3°C Inline Teflon heater / Heat exchanger: 16°C ± 1.0°C Teflon pump Direct drain 2021 vintage.
還沒有評論