二手 OXFORD Plasmalab 100 #293743445 待售

System (2) Process modules Quartz clamp, 6" PECVD Left chamber ICP/RIE Right chamber with turbo Endpoint detector laser Square loadlock with rotating arm PLC Controller (3) Oil pumps Chiller PC PECVD Gas pod: SiH4 (Silane), N2O and NH3 (Ammonia) ICP/ RIE Gas pod: C4F8, O2 and He Operating system: Windows 2000.