二手 PLASMATHERM 790 #293729354 待售

ID: 293729354
晶圓大小: 2"-6"
優質的: 1993
Reactive Ion Etcher (RIE), 2"-6" Single chamber Material used: Gas and Silicon MFC: N2/SiH4/HE, HE, NH3 Pump HX75 Chiller RF No loadlock Throttle valve Ion gauge controller: Manometer Gas panel Fluid input panel Temperature control system Operating system 1993 vintage.
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