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PLASMATHERM 790
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PLASMATHERM 790 #293729354

PLASMATHERM

790

Reactive Ion Etcher (RIE), 2"-6" Single chamber Material used: Gas and Silicon MFC: N2/SiH4/HE, HE,
96
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PLASMATHERM 790 #293636673

PLASMATHERM

790

Reactive Ion Etcher (RIE), 6", parts system PFEIFFER / BALZERS TPH240 Turbo vacuum pump with TCP 380
206
PLASMATHERM 790 #9260193

PLASMATHERM

790

PECVD System Operating system: Windows 3.1 RF Plasma ADVANCED ENERGY RF 5S Power supply Power outpu
201
PLASMATHERM 790 #9124022

PLASMATHERM

790

PECVD Deposition system, 2"-6" PC OS controlled 8" Electrode Advanced Energy RFPP - RF5S power supp
194
PLASMATHERM 790 #9156796

PLASMATHERM

790

PECVD Deposition system, 8" Upper & lower electrode Advanced Energy RFSS 5S Lower electrode heated
179
PLASMATHERM 790 #9296262

PLASMATHERM

790

PECVD System, 8" RIE Dual chamber Manual load Non-load lock RFPP RF5S RF Power supply with matching
241
PLASMATHERM 790 #9156794

PLASMATHERM

790

PECVD Deposition system, 2-8" PC OS controlled 11" Electrode Advanced Energy RFPP - RF5S power supp
214
PLASMATHERM 790 #9156748

PLASMATHERM

790

Reactive Ion Etcher (RIE), 8" Windows: PC Controlled with flat panel display Lower electrode, 11" M
160
PLASMATHERM 790 #9113757

PLASMATHERM

790

VLR RIE system Single wafer manual load system No load lock Alcatel turbo with controller Gate valv
202
PLASMATHERM 790 #9296260

PLASMATHERM

790

PECVD System 2001 vintage.
197