二手 KLA / TENCOR 2138 XP #293792053 待售

Wafer inspection system, 6"-8" Dual open cassette CIM: SECS / GEM Robot Line conditioner Fan module Inspection station No ADC Station No ISMF Controller Chuck type: Low contact chuck Line conditioner: 18 KVA, 50 A, 3 Phase Power requirement (IS Module): 208 VAC, 3 Phase WYE, 50/60 Hz Power requirement (UI Module): 208 VAC, 3 Phase WYE, 50/60 Hz Operating system: Windows NT 1998 vintage.