二手 KLA / TENCOR SP1-DLS #9211112 待售

Wafer surface analysis system, 12" With backside inspection module Includes: Defect sensitivity: .050 um Enhanced edge exclusion Enhanced rough film sensitivity Argon ion laser: 488 nm (4) Dark field collection channels: Normal wide Normal narrow Oblique wide Oblique narrow RTDC Map to map Measurement chamber with ULPA filter and blower unit Operator interface Operating system: Microsoft windows NT 4.0 Interactive pointing device Keypad controls TFT Flat panel display, 18" Parallel printer port Defect map and histogram with zoom Microview measurement capability Part number / Description 0042021-000 / Edge handling 12" 0042027-000 / Dual FIMS 12", bulkhead with backside inspection module, dual FOUP Handling module ASYST, edge handling, bulkhead mounted with dual UI, FLECWA 0025832-000 / 45A/250V, Domestic voltage requirement 547301 / Bulkhead UI, dual FIMS, SP1 571237 / System, DLS 571075 / Bright field, dual plane bright field, run simultaneously with dark field normal / Dark field oblique 515990 / XY Coordinate 570133 / 4 Color light tower 0028618-000 / Backside inspection option, backside inspection module requires edge handling CALCURV-SPO3 / Cal curve oblique, 12" 543047-12 / SP1 DLS Conformance test document (CTD) 528080 / HSMS RFE5-18036 / E87 Carrier management services RFE55-20835 / E 40 / E 94 Process job management / Control job management and E 90 Substrate tracking 0043182-000 / Carrier ID hermos single wire 2002 vintage.