二手 KLA / TENCOR Surfscan SP2 #9314791 待售
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ID: 9314791
晶圓大小: 12"
Inspection system, 12"
Scan module
Blower
Processor: 2.2 GHz
Operating system: Windows XP
Oblique incident
Edge cut: 2 mm
STD Throughput
Enhanced XY Co-ordinate
Defect classification: Slipline, Scratch and LPD-N
Haze normalization
Haze analysis
Optical filter
Space filter: 20°
Space filter: 40°
Space filter rough film
Options:
Part number / Description
0088725-000 / Normal incident
0088727-000 / High sensitivity mode
0088727800 / High throughput mode
0088732-000 / GEM/SECS
0088733-000 / HSMS
0088731-000 / NFS Client
0088737-000 / E84 Automation support, 12"
0088738-000 / E87 Automation support, 12"
0088739-000 / E40/E94/E90 Automation support, 12"
0088748-000 / LPD-E/S Classification
0088749-000 / Grading / Sorting
0088740-000 / Printer
J00012 / Printer rack
- / BSIM
- / Pato-light
Wafer thickness:
0.725 mm, 8"
0.775 mm, 12"
Sensitivity:
High sensitivity:
Oblique:
Wide: 37 nm
Narrow: 60 nm
Normal:
Wide: 61 nm
Narrow: 78 nm
STD Sensitivity:
Oblique:
Wide: 42 nm
Narrow: 70 nm
Normal:
Wide: 68 nm
Narrow: 83 nm
High throughput:
Oblique:
Wide: 47 nm
Narrow: 80 nm
Normal:
Wide: 72 nm
Narrow: 93 nm
Throughput:
High sensitivity mode:
Edge handling dual FIMS: 15 WPH
Vacuum chuck dual FIMS/Open: 24 WPH
Vacuum chuck 8": 40 WPH
Edge handling 4 x 8": 32 WPH
STD Mode:
Edge handling Dual FIMS: 30 WPH
Vacuum chuck Dual FIMS/Open: 49 WPH
Vacuum chuck, 8": 68 WPH
Edge handling 4 x 8": 55 WPH
High throughput mode:
Edge handling dual FIMS: 58 WPH
Vacuum chuck dual FIMS/Open: 75 WPH
Vacuum chuck, 8": 90 WPH
Edge handling 4 x 8": 80 WPH
Lighting smooth
DPSS Laser : 350 mW, 355 nm
Vacuum:
Scan module
Pressure: -24 ~ -30 Hg
Flow: 1 SCFM
FOUP Opener (Dual FIMS):
Pressure: -24 to -24 Hg
Flow: 1 SCFM
Compressed air:
Scan module
Pressure: 85-105 psi
Flow: 4 SCFM
Condensation: -29°
Edge end effecter:
Pressure: 90~120 psi
Wafer handling:
Edge handling
Vacuum chuck
Data output:
High resolution TFT color flat panel display
USB
Parallel port
Serial port
DVD+RW Drive
Floppy Disk Drive (FDD), 3.5"
Network connector: 10/100 Base-T
ISDN Connector
Voltage: AC 200 V±10%
Frequency: 50-60 Hz ± 5%
Power supply: 200 V, Single phase, 2.88 kVA.
KLA/TENCOR Surfscan SP2是一種高度先進的掩模和晶圓檢測設備，用於確保半導體芯片生產的質量和一致性。該系統使用明亮的激光照明源和高分辨率圖像檢測單元，以以前系統中看不見的分辨率級別捕獲晶圓、蒙版和標線上特征的圖像。KLA Surfscan SP2測量最復雜的標線上0.5微米的公差，以確保最高的精度和精確度，並且可以檢查超出常規光學檢查系統的特征尺寸。該機使用專利的「激光加快門」技術，在所需的視場範圍內獲取掩模或晶圓上最小特征的清晰圖像，其動態鏡頭工具允許用戶將分辨率放大至x 128。此外，資產先進的高靈敏度圖像處理技術能夠獲得高精度的各種場大小的圖像，高達55分貝。TENCOR SURFSCAN SP 2的設計考慮到了簡單的操作,它具有用戶友好的界面和直觀的圖形控制,允許簡單的設置和操作。它配備了用於快速準確的缺陷隔離的反饋（FB）算法,以及針對傳統的「直印」和「劃痕」等困難缺陷的專利缺陷隔離技術。為方便用戶，該模型捆綁了一套軟件工具，能夠生成各種文件格式的掃描數據報告，包括txt、csv和html文件。KLA SURFSCAN SP 2是一款緊湊、完全自動化的設備,可現場升級,並且需要最少的服務支持,因此是滿足關鍵掩蔽和晶圓檢查需求的理想檢查選擇。它專為質量關鍵型大批量生產環境而設計,其軟件和硬件的高效組合提供了最高水平的準確性、可靠性和速度。
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