二手 DNS / DAINIPPON 629 #9276178 待售

Coater system, 6" Loader / Unloader, 6" Step motor driving system Individual unit control I/H Unit, 6" Wafer handling arm material: SUS304 Wafer loading method: Handling arm with vacuum Digital wafer sensor Step motor driving system Bake, 6" Type: HP + CP H.M.D.S Included Wafer loading method: Wire moving with cylinder Developer spin unit, 6" Develop type: Rotation spray with spin motor Chemical liquid discharge method: N2 Pressurization Wafer chuck size, 70 mm Spin cup Polypropylene resin: Upper: 8" Lower Nozzle type: Spray nozzle Exhaust control system Spin cover: Transparent acrylic Maximum spin motor: 6000 RPM Waste liquid drain: Natural drain Wafer moving: Step motor Coater spin unit, 6" Coating method: Rotation with spin motor Maximum RPM: 6,000 P/R Discharge method: BELLOWS Pump Wafer chuck size, 70 mm Spin cup Polypropylene resin: Upper: 8" Lower (2) Nozzles Type: 1/8" / Track Exhaust control system: Manometer Spin cover: Transparent acrylic Maximum spin motor: 6,000 RPM Maximum P.R Dispense: 20 cc / 1 Strock Waste liquid drain: Manual drain Wafer moving: Step motor Bake, 6" Type: AGILENT / HP / HEWLETT-PACKARD / KEYSIGHT 2-Stage Maximum temperature: 250°C Wafer moving: Cylinder Utilities: Power supply: AC, 110 V, 30 A, 1 Phase AC, 220 V, 30 A, 1 Phase Air pressure: 4 ~ 5 Kg/Cm² N2 Pressure: 3 ~ 4Kg/Cm Vacuum pressure: 60~70 CmHg Spin exhaust: 100 mm (20 mmHg) Bake exhaust: 70 mm (20 mmHg).