二手 DNS / DAINIPPON SK-2000 #9277248 待售

(4) Coater / (4) Developer systems, 8" Resist temperature system Resist Pump Wafer shape: SNNF Wafer cassette: 8" PP MIRAIAL (2) Process blocks (2) Coater heads (2) Barc coater heads (4) Develop heads (2) Adhesion chambers (10) Cooling plates (12) Rapid hot plates (3) Hot plates (1) EEW (1) EEFT (1) IFB (1) Source bottle cabinet (1) Chemical box (HMDS/Solvent/NMDW) (1) Controller cabinet (1) Power box (1) Handling unit controller (1) Carrier station (6) Nozzle Cup: Top cup material: PP Middle cup material: PP Bottom cup material: PPS Spin chuck: Material: Peek Back rinse flow meter with flow sensor Mist nozzle flow meter with flow sensor Edge cleaner flow meter with sensor With VPS+ option Solvent solution supply Drain central Barc Nozzle slit scan nozzle Develop solution supply Central supply Developer Cup PVC Spin chuck PEEK Develop nozzle flow meter with sensor Develop nozzle wash meter with sensor Rinse nozzle flow meter with sensor Back rinse flow meter with sensor Develop temperature System Control for 1 line x 2 Drain central Adhesion Method vapor prime by N2 bubbling Hot plate 60-150 deg by 0.1 deg pitch HMDS solution supply central supply Hot plate Method proximity bake with ceramic ball Hot plate 50-180 deg by 0.1 deg pitch Cooling plate Rapid hot plate.