二手 EVATEC Solaris S151 #293752399 待售

Multi-chamber sputtering system (6) Cathode chambers: (2) Sources with diameter of 30 cm each Heating source (3) Multi-sources Substrate sizes and throughput (for typical configurations): Processable substrates with ∅ 200 mm or 156 mm × 156 mm edge length Maximum thickness: 2 mm Capacity: Max. 1200 substrates per hour Cycle time < 3 seconds. Media supply: Gases: Argon, Oxygen, forming gas (Ar:H2 = 95:5), Nitrogen Compressed air Cooling water Exhaust air 2007 vintage.