二手 KARL SUSS / MICROTEC Gamma DSSP #9232866 待售
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ID: 9232866
優質的: 2013
Coater / Developer system
4M
Quantity / Part number / Description
(1) / V700041 / SUSS Gamma microlithography cluster 4M
(1) / 100005154 / SUSS Gamma frame extension 2S
(1) / 100005155 / SUSS Gamma adjustable air flow cover 4M
(1) / 100009611 / Safety interlock for all doors on the system
(1) / 100005513 / Auto carrier ID dialog
(1) / V700032 / Bar code reader for sequence selection
(1) / 100009610 / Single end effector robot (SR8230)
(1) / V711021 / Optical cassette scanner
(1) / 100001254 / Special stacked (4) I/O gamma
(1) / Q11986-08 / Carrier-LEDs for (2) carriers
(1) / 100010113 / Rotational pre-aligner
(1) / Q200286-01 / Special fork type vacuum end effector R4-R6 for robot with minimized heat transfer
(2) / V709001 / SUSS Topography coater alta sprays
(2) / 100006861 / Special substrate assembly R4 alta sprays BSR
(2) / - / Special substrate assembly R6 alta sprays BSR
(2) / V734510 / Resist spray dispense system up to 30cP with filter and reservoirs
(2) / V723000 / Resist bottle holders
(2) / V723010 / Resist bottle adapters
(2) / V734520 / Pre wet dispense nozzle alta sprays
(2) / V734540 / BSR Dispense option alta sprays, 50ml
(2) / V734545 / Additional chuck vacuum lines
(2) / V745120 / Filter unit solvents
(1) / V736101 / Aqueous process module
(1) / V736111 / Programmable dispense arm AQ
(1) / V736135 / Substrate assembly R4-R6 AQ
(1) / V736300 / Puddle dispense system AQ
(1) / V736320 / Fan spray dispense system AQ
(1) / Q736320 / Fan spray dispense system AQ for 3rd line
(1) / V736340 / Topside rinse dispense AQ
(6) / V736390 / Flow detection sensors AQ
(1) / V745100 / Filter unit DI-water
(1) / V745110 / Filter unit AQ developer
(1) / V738030 / Nitrogen drying option
(1) / V740010 / Hot / Cool plate / Vacuum prime stack module
(2) / V744110 / Hot plate cassette 250° C proximities
(2) / V744230 / Cool plate cassette proximities
(1) / V744300 / Vacuum primer
(1) / 100000699 / Substrate assembly vacuum primer R2-R8
(1) / V744340 / Pressure tank system (5L Stainless steel / HMDS) / Bubbler
(1) / V744350 / Safety package HMDS
(1) / V826020 / JULABO FL601 TCU, 50 Hz
(3) / V760011 / Media storage stainless steels
(1) / V760120 / Pressure tank system (10L stainless steel bulk fill)
(2) / 100005184 / Pressure tank systems (5L PE bulk fill) KALREZ
(1) / V760240 / Waste canister (20L Stainless steel) quick
(1) / V772005 / Additional gas monitor
2013 vintage.
KARL SUSS/MICROTEC Gamma DSSP是一種為微加工而設計的光刻設備。它結合了光學和電氣技術，以確保抗蝕層在基板表面的精確沈積。該系統由真空沈積室、真空操縱器、註射器單元和圖案面罩組成。沈積室設有高精度、氣動操作的平臺，可三維移動。此平臺允許在緊鄰掩碼的地方放置可重復的晶圓。沈積材料，通常是先進的光刻膠制劑，如光刻膠聚合物，通過註射器機泵送。註射器工具可用於精確控制光敏材料的流量、劑量和圖樣。資產還包括一個模式面罩，通常由石英或金屬制成，附著在沈積室上。該面膜用於限制沈積的光致抗蝕劑材料對某些區域的暴露。面膜的圖案是通過光刻產生的。集成激光曝光模型則提供紫外線，以增強暴露區域的激活。設備有一系列的電壓設置，允許定制沈積時間和精確控制抗蝕層質量。抗蝕層在用戶可選擇的溫度下「烘烤」，從而在各層之間形成物理、化學或電鍵。該系統還具有真空室的氣動控制功能，可實現全過程的終極精度和可重復性。MICROTEC Gamma DSSP是一種先進的光刻裝置，能夠在基板表面沈積極薄、均勻、復雜的層。它將高精度、量身定制的註射器系統與光刻的精密圖樣技術相結合，以確保精確、可重復的結果。它是一種多用途的機器，為用戶提供對沈積過程的全面控制，以用於各種微加工應用。
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