二手 SEMITOOL 270F #178372 待售

Table-top Spin Rinse Dryer (SRD) Capable of processing up to 6" wafers "F" model has the class 10 poly, brush motors and the PSC-101 controller Controller Compatability: PCS-101 DI Water Recirculation: YES Motor Seal: Ferrofluidic Motor Type: Brush N2 Heater Capable: YES Resistivity Monitoring Capable: YES Rotor Type: 4 Bolt Static Eliminator Capable: YES Substrate size: 150 mm max. System Configuration: Table Top Single Bowl Specifications: 101 Controller, Digital Polypropylene cabinet Up to 6" process capability Brush motor Teflon DI and N2 lines Color coded pneumatic tubing Bowls to be electropolished Ferrofluidic Seal design 110V ready system 4 Bolt rotor design - No rotors are included DI resistivity monitor option is included Anti Static module option is included DI recirculation option is included Electropolish metal surfaces Spin dryer bowl Nitrogen manifold Mounting brackets Components: Gaskets & O-Rings for D.I. Water Manifold Nitrogen manifold Rear bowl seal Door seal Vibration dampers Color-coded pneumatic tubing Teflon lines for N2 Teflon lines for D.I. DI Nozzles N2 Filter.