二手 SEMITOOL Raider ECD 310 #9357913 待售

Electroplating system, 12" Ulpa filtration, P/N: 70006-401 (3) Exhausts Drip pan LT Process robot, P/N: 610T0300-01 Station control User Interface: Rear, P/N: 650T0030-03 Front, P/N: 650T0030-501 Operating system: Embedded XP system (2) USB Ports Metrology unit, P/N: 90005-81 Buffer station, P/N: 640T0377-01 Transfer robot, P/N: 610T0300-01 FOUP / Cassette: ENTEGRIS F300 Auto pod, P/N: 01-018675 Wafer diameter: 300 ± 0.25 mm Wafer pitch: Half Pitch Wafer mapping capability: E84 Parallel I/O sensors, P/N: 4012-25 E99 Carrier ID reader (3) HERMOS RF Tag readers (3) FOUP Load ports, P/N: 640T0147-505 Chemical connections: Line-1: Catholyte A 180L Line-2: Anolyte A 65L Line-5: H2SO4 Line-6: H2O2 Line-7: CDA Line-8: DI Line-9: N2 Line-10: House vacuum Line-11: CO2 Fire suppression Photospec probe, P/N: 90005-01 pH Probe, P/N: 61326-16 Sampling port, P/N: 429T1635-503 RTA Probe, P/N: 90005-50 Real time analyzer: Gold box Drain Chamber 1 and 2: Rinse dry with bevel etch capability Lift automation assembly, P/N: 200T0085-03 Mixing tank, P/N: 330T0188-01 Delivery tank, P/N: 330T0190-15 Bowl, P/N: 100T0143-09 Temperature control: Heating / Cooling coils N2 Dryer Chamber 3, 4, 5, 6 and 7: Electroplating chamber with membrane Automation assembly L/R, P/N: 240T0057-01 Catholyte tank, P/N: 330T0186-515 Anolyte tank, P/N: 330T0243-501 Temperature control: Heating / Cooling coils Anodes, P/N: 14400-90 Membrane, P/N: 111T1388-03 Filter, P/N: 7004-63 Pump, P/N: 70959-31 De-bubbler, P/N: 119T1289-03 Ring rinse nozzle, P/N: 341T0043-01 Wafer rinse nozzle, P/N: 341T0043-01 Power supply, P/N: 900C0329-01 Chamber 8: Automation assembly L/R, P/N: 240T0057-01 Catholyte tank, P/N: 330T0186-515 Anolyte tank, P/N: 330T0243-501 Temperature control: Heating / Cooling coils Anodes, P/N: 14400-90 Membrane, P/N: 111T1388-03 Filter, P/N: 7004-63 Pump, P/N: 70959-31 De-bubbler, P/N: 119T1289-03 De-bubbler, P/N: 119T1289-0 Does no include Hard Disk Drive (HDD).