二手 SSC BPE-2708-SP #9220820 待售
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ID: 9220820
晶圓大小: 8"
優質的: 2006
Gold plating machines, 8"
Plating mechanism: Fountain, face-down
Manual wafer load and unload
Solution: Non-cyanide, Au solution
Solution capacity: (14) Cups, 8"
Temperature control: Direct heating
Mechanism: PID Control
Temperature control range: Room temperature to ~70°C
Flow rate: Auto control by flow sensor, cup / Pump control mechanism
Plating tank: Laminate
Upper lid: PVC
Cup holder: HT-PVC and PPS, 8"
Upper lid arms: SUS Coated with PTFE
Upper lid open / Close: Air cylinder
Fountain pump: Polypropylene
Valve: PTFE AV valve, HT-PVC, PVC and PFA
Piping of Au solution: HT-PVC, Polypropylene and PFA
Piping of DIW and drain: HT-PVC, PVC, and PFA
Piping of exhaust: PVC
Plating unit: PVC
Cup location: (7) Lines x (2) cups
Fountain pumps: (14) MD-100FYK With inverter control: 8~50 L/min
With cup / Pump flow rate
Circulation pumps: (2) MD-100FYK With inverter control
With (2) circulation piping lines
Fountain filtration: (14) Sets of PP (housing and cartridge)
Circulation filtration: (2) sets of PP (housing and cartridge)
Solution level control: N2 level sensor for each solution tank
With (2) upper, lower, fixed, additive
Sensors: Temperature, leakage, flow rate, area
(4) Heaters, 3 kW
Power supply: Cabinet (Caster and adjuster)
Fixed electrical current
2-Channel switch: (2) 8~3000 mA (8 ~300 mA)
Precision: ±0.5 % by 300 mA
Control: Sequence control
Touch panel and PLC
Data recorded PC
(30) Programmable numbers
(90) Recipes per programmed number
Count current mod (mA / Hour)
Bump height uniformity: ≤ 5 % (10-15) points / Wafer
Bump height uniformity: ≤ 2 um - ≤3 um, 8" (80-120 points)
Flow rate: 35 L/min, no leakage from backside
Edge contact area / Cathode
No plating cup
2006 vintage.
SSC BPE-2708-SP Photoresist設備是一種先進的自動化精密激光曝光系統,旨在滿足快速發展的制造技術的需求。它非常適合要求高精度、高細節分辨率的先進光刻應用。在其核心,單元配備了SSC專有的固態激光機。這種激光工具以各種可調節的頻率、持續時間和能級產生高功率脈沖,可以精確準確地曝光光刻材料而不會造成損壞。資產還包括一對高分辨率相機系統,旨在監測和控制激光曝光過程。這保證了激光的每一次通過都精確地遵循預定的圖樣,從而產生均勻的光致抗蝕劑曝光。此外,該模型還包括一個自動化的物料處理設備因素。這使操作員能夠在每個光刻作業中快速輕松地加載兩個標準掩碼,從而最大限度地提高吞吐量。物料處理系統確保在激光發射前可以精確定位口罩,從而產生高精度和重復性。該單元還包括一臺高功率、能幹的歸檔機。這使操作員能夠存儲光刻設置和參數,以便於召回,從而進一步提高吞吐量。該工具通過直觀、易於使用的界面進行控制。該顯示器包括對光刻進度的實時反饋,提供每個激光曝光步驟結果的視覺總結。總體而言,BPE-2708-SP Photoresist Asset是高級光刻應用的理想解決方案,需要高精度和高細細分辨率。其強大的功能集和自動化的物料處理可實現高吞吐量,並確保每項工作都能獲得可重復且一致的結果。
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