二手 SVG 88 #293724120 待售

Coater / Developer system, 6" Upgraded to AIO Duna 700 Wafer type: Silicon round wafer Wafer flow: left to right Standard poly floors Teflon insulated mainframe wiring Dual track (3) CYBOR Photoresist pumps with controller Brushless motor Servo controller Conversion kit, 4" Automatic Transfer System (ATS) Assy Indexer assembly: Capacitance wafer sensor 3/16" Pitch (25-Wafer cassette setup) Sliver teflon coated platform Hot plate oven assembly: Clear anodized 3-Pin (Temperature: < ±0.5°C) 3-Pin lift for wafer handling AIO Enhanced cast-in heating element: 220V, 450W WATLOW Controller with PID Control Auto tuning ± 0.1% calibration accuracy Temperature uniformity: ± 0.1°C Digital LED Display Proximity / contact bake control Common stainless steel exhaust manifold assembly RTD temperature probe Temperature range: 50°C to 250°C Coat module assembly: Programmable pivoting moving dispense 3-Dispense lines / Top EBR Assy AIO Low profile catch cup assembly with build-in Bottom EBR Brushless spin motor Servo controller Programmable pre-dispense cup up to 99-Cycles Pivoting Z-Axis moving dispense Dispense nozzle: 3/16" x 3/16" x 3/16" Digital vacuum switch Top and bottom EBR Interlocked safety cover Solvent vapor tip bath Purge system for dispense line Positive developer module assembly: Programable moving dispense assy NESLAB CTD Cart Brush high spin motor Nozzle (Spray, stream, back wash) Digital vacuum switch Interlocked safety cover CPU Board: Direct interchangeable with SVG CPU Store up to 99 programs Capable component exercise NETTRACK CPU board (2) PCs, Windows XP Power supply: 220/240V, Single Phase, 50/60Hz.