二手 TEL / TOKYO ELECTRON ACT 8 #9312218 待售

Coater / Developer system, 8" System controller (2) Chemical cabinets: Chemical cabinet 1: HMDS, Solvent and developer Chemical cabinet 2: PR (2) SMC Temperature Control Unit (TCU) AC Power box Carrier station: Type: Uni-cassette 4-Cassette stages, 1 pick-up Coater unit: (4) Dispense nozzles with temperature control line Mini RRC pump Rinse nozzle: EBR, Back rinse, solvent bath Rinse system: 3 Liters (2) buffer tank systems PR Suck back valve type: Suck-back valve Direct drain TARC Coater unit: (3) Dispense nozzles with temperature control line Mini RRC pump Rinse nozzle: EBR, Back rinse, solvent bath Rinse system: 3 Liters (2) buffer tank systems PR Suck back valve type: Suck-back valve Direct drain Developer unit: H Nozzle (2) Stream nozzles for D.I W rinse 2 Points for back side rinse Developer system: 3 Liters (2) buffer tank systems Developer temperature control system Direct drain (2) Adhesion units: Closed chamber (Built-in hot plate) HMDS Tank with float sensor Interface High temperature hot plate (14) Low temp hot plates (7) Chill plates (CPL) (4) Chilling Hot Plate (CHP) process station (3) TRS Modules TCP Module HCP Module Wafer Edge Exposure (WEE) Module Wafer type: Notch, DUV type Missing parts: CSB motor I/O Board 2-0 PRA θ Motor driver CSB Add on board 3-4 Panasonic motor 3-1 Out cup cylinder 3-1 Arm 1 3-1 Arm 2 PRB2 Chemical IO board Temperature and humidity controller ((2) Cups) 2-0 PRA X Motor driver 4-0 IRA Z Motor drive 4-0 IRA UPS WEE Theta driver 4-0 IRA Motor IO board 4-0 IRA IFB Add on board Hard Disk Drive (HDD) 2000 vintage.