二手 TEL / TOKYO ELECTRON ACT 8 #9312222 待售

Coater / Developer system, 8" Main frame with system controller Carrier station: Type: Normal uni-cassette 4-Cassette stages Pick-up cassette Coater unit: (3) Dispense nozzles With temperature controlled line RRC Pump Rinse nozzle: Back / EBR / Solvent bath Rinse system: 3 Liters (2) Buffer tank systems P.R Such-back valve type: Suck-back valve Direct drain TARC Coater unit: (2) Dispense nozzles With temperature controlled line RRC Pump Rinse nozzle: Back / EBR / Solvent bath Rinse system: 3 Liters (2) buffer tank systems P.R Such-back valve type: Suck-back valve Direct drain Developer unit: SH Nozzle (2) SH Nozzles for DI Rinse 2-Points for back side rinse Developer system: 3 Liters (2) buffer tank systems Developer temperature control system Direct drain (3) Adhesion units: Sealing closed chamber (Built-in hot plate) HMDS Tank with float sensor system Interface (15) Low temp hot plates (14) Chill plates (CPL) (3) TRS Module TCP Module Wafer Edge Exposure (WEE) Module Wafer type: Notch, DUV Type (2) Chemical cabinets: Chemical cabinet 1: Solvent and developer Chemical cabinet 2: HMDS and PR (2) Temperature Control Units (TCU) AC Power box Missing parts: 2-1 COT Spin I/O Board 2-4 COT EBR Nozzle tip 2-4 COT EBR Nozzle valve 2-1 Nozzle changer motor 3-2 Shutter cylinder (2) PRB YASUKAWA Spin motor drivers 2-0 PRA Z-Driver 3-0 PRA Z-Driver Temperature and humidity controller (For 4 chu) Hard Disk Drive (HDD) 2001 vintage.