二手 TEL / TOKYO ELECTRON ACT 8 #9357239 待售

Coater / Developer system, 8" Main frame with controller Carrier station: Type: Normal uni-cassette (4) Cassette stages Pickup cassette Coater: (3) Dispense nozzle with temperature controller for etcher RRC Pump Rinse nozzle: Back / EBR / Solvent bath for etch unit Rinse: (2) Buffer tanks: 3 Liter PR Suck-back valve Direct drain TARC Coater: (2) Dispense nozzle with temperature controller for etcher RRC Pump Rinse nozzle: Back / EBR / Solvent bath Rinse: (2) Buffer tanks: 3 Liters PR Suck-back valve Direct drain Developer: SH Nozzle (2) Stream nozzles for DI rinse (2) Buffer tanks: 3 Liters Temperature controller Direct drain (3) Adhesions: 100% Sealing closed chamber (Built-in hot plate) HMDS Tank with float sensor (15) Low Temperature Hot Plates (LHP) (14) Chill Plates (CPL) TCP Module (3) TRS Modules Wafer Edge Exposure (WEE) module: Wafer type: Notch, DUV Notch DUV Chemical cabinet 1: Solvent and developer Chemical cabinet 2: PR and HMDS (2) TEL OEM Temperature controllers AC Power box Interface Missing parts: 2-1 COT Spin I/O Board 2-4 COT EBR Nozzle tip 2-4 COT EBR Nozzle valve 2-1 Nozzle changer motor 3-2 Shutter cylinder (2) PRB YASUKAWA Spin motor drivers 2-0 PRA Z-Driver 3-0 PRA Z-Driver Temperature and humidity controller (For 4 chu) Hard Disk Drive (HDD) 2001 vintage.