二手 TEL / TOKYO ELECTRON Clean Track ACT 8 #9191941 待售

Photoresist processing system, 8" Carrier station (CSB) With 1 x 4 loader Pick up stage Coater unit (COT) for resist coating Resist dispense line With TEL HPT Resist pump (LOR 10A) Adjustable suck-back valve Resist consumption feature Backside rinse Programmable topside edge bead remover Programmable dummy dispense Direct drain Yellow LED light module in spinner unit PTI Active mass flow control Polymide coater unit (PCT): Pressurized dispense system for polymide: Lit-lifting mechanism With pressure sensor system Backside rinse Programmable topside edge bead remover Programmable dummy dispense Direct drain Yellow LED light module in spinner unit PTI Active mass flow control Developer unit (DEV) for puddle develop Super H nozzle (TMAH) Top and backside rinse (DIW) Yellow LED light module in spinner unit Direct drain Polyimide developer unit (PI DEV): Spray nozzle set for spray develop (Cyclopentanon) Straight nozzle for puddle develop (Cyclopentanon) Spray nozzle set for spray rinse (PGMEA) Top and backside rinse (PGMEA) Yellow LED light module in spinner unit Direct drain Central Supply PCS (Pump chemical supply system) for Cyclopentanon With two-canister auto-switch system Central supply two-tank auto-supply system (PGMEA and TMAH) Thermal units: Chill plate process station (CPL) Low temperature hot plate process station (LHP) Heater cover hot plate process station (HCH) Transition stage (TRS) Transition chill plate (TCP) Cup washer holder (CWH) AC Power box: 208VAC Thermostatic water supply unit Side cabinet for polyimide & PGMEA Supply Chemical cabinet for Cyclopentanon & TMAH supply Cup temperature & humidity controller CP-2 (Coater & PI coater unit) CE Marked 2015 vintage.