二手 TEL / TOKYO ELECTRON Clean Track ACT 8 #9245118 待售

(4) Coater / (4) Developer system, 8" (2) Chemical cabinets: Solvent and developer (2) SMC Thermo controllers: HMDS, PR YEST YIB-TP23 T and H Controller AC Power box MFC: 4-Ports Right to left Wafer type: Notch, DUV type DUV Type 25-Slots Loading configuration: (4) Loader uni-cassettes Carrier station: Type: Normal uni-cassette (4) Cassette stages Pick-up cassette Uni-cassette system Coater unit (2-1, 2-2, 2-3, 2-4 Module): (4) Dispense nozzles With temperature controlled lines RDS Pump Rinse nozzle: Back / EBR / Solvent bath Rinse system: 3 Liters (2) buffer tank systems PR Such-back valve type: AMC Suck-back valve Programmable side rinse Direct drain Developer unit (3-1, 3-2, 3-3, 3-4 Module): H Nozzle (2) Stream nozzles for DI rinse 2-Points for back side rinse / Unit Developer system: 3 Liters (2) buffer tank systems Developer temperature control system Direct drain (2) Adhesion units: 100% Sealing closed chamber (Built-in hot plate) HMDS Tank with float sensor Interface type: ASML (3) High temperature hot plates (15) Low temp hot plates (10) Chill plates (CPL) (4) Precision Hot Plate (PHP) process station (3) TRS Modules TCP Module Wafer Edge Exposure (WEE) module (2) TEL / TOKYO ELECTRON Temperature control units Main controller missing Power: AC 208 V, 3-Phase 2002 vintage.