二手 TEL / TOKYO ELECTRON Clean Track ACT 8 #9248792 待售

(2) Coater / (2) Developer system, 8" Direction: Right to left (25) Slots (4) Uni-cassette loaders Main controller: Type 2 CSB PRB1 IFB Power box T&H Controller Chemical box Thermo controller Main system: Main frame with system controller Carrier station: Type: Normal uni-cassette (4) Cassette stages Pick-up cassette Uni-cassette system Coater unit (2-1, 2-2): (4) Dispense nozzles with temperature controlled lines for etch unit RRC Pump Rinse nozzle: Back / EBR / Solvent bath for etch unit Rinse system: 3 Liters (2) Tanks buffer tank system P.R Suck-back valve type: Air operation suck-back valve Programmable side rinse Drain: Direct drain Developer unit (2-3, 2-4): Steam nozzle for each unit (2) Stream nozzles for DI rinse and 2-points for back side rinse on each unit Developer system: 3 Liters (2) tanks buffer tank system Developer temperature control system Drain: Direct drain Interface type: ASML (8) Low temperature hot plates (LHP) (4) Chill plates (CPL) (4) Chilling hot plate process stations (CHP) TCP Module (2) TRS Modules WEE (wafer Edge Exposure) Module Wafer type: Notch Chemical cabinet TEL / TOKYO ELECTRON Temperature Control Unit (TCU) AC Power box Missing parts: 2-5, 2-17 ADH Module assemblies Circulator pump IRA T Axis motor driver WEE CCD Board WEE X Axis motor driver (2) 2-2 COT P.R Pumps (2) Developer buffer tanks 2-2 Spin chuck T&H Controller Main controller hard disk System power rating: AC 208V, 3-Phase 1999 vintage.