二手 TEL / TOKYO ELECTRON Spare parts for Clean Track Mark 7 / 8 #293656853 待售
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ID: 293656853
Description:
Arm ceramic, 4"-8"
Mapping assy, 4"-8"
SANYO DENKI / 103-4505-7040 / X-Axis motor
Y-Axis Assembly
X-Axis Assembly
Z-Axis Assembly
OPE Pane CONN board 3
CONN Board
TAIYO Boards
Arm I/F Board
C/S Unit ( 1120 x 500 x 167 AC 100V ) FFU Filter
Frame
Spin unit frame
C/S Stage
P/R Bath drain assy
P/R Dispense arm nozzle
Spin unit connection board
Scan arm board
Scan arm CONN Board
Spin cover latch board sw
Coater cup assy, 6"-8"
Coater SUS Cup assy, 8"
Spin motor
Vacuum seal and housing
Spin motor driver (PADT-300WD AC Servo driver)
Spin chuck
Base plate back side plate
EBR Nozzle assy
EBR Needle (0.3 mm)
BSR Needle (0.5 mm)
P/R Buffer tank (45CC)
P/R Bottle cap
H Nozzle assy
E2 Nozzle assy
Stream nozzle, ¼"
Main arm HS Conn A Board
Main arm HS Conn B Board
Main arm assy
(3) Main arm pincette
(3) Main arm pincette(X Motor)
Main arm stepping motor (P/N: 103H7522-80E3)
Main arm HS Conn C-board
Main arm spring cable
Silicon wafer glass wafer modify (Cover, AMP, sensor M/A Cooling panel)
(3) Main arm pincette (Wafer blocks)
Main arm ribon cable
Diskette drive, 3.5"
Dual SSD back up
NEC PC 9801F, 9821 KA, KE Data back up
Coater I/O C Board develop I/O C Board
Heater unit I/O BS Board
OPE Pane unit I/O BS
HMDS assy
HMDS Buller tank
HPO assy
Plate oven (HPO Temperature: 200°C, DHP Temperature: 350°C, HMDS Plate, temperature: 200℃
HP Base assy, Cover Slider assy, HP Support assy, Shutter assy
HPO Pin
Oven CONN board
Plate CONN board
Thermo controller (P/N: INR 244-113)
Cool plate assy
CHP Unit assy
Buffer tank (3 Liters)
SUS Canister (20 Liters)
CONN Board
CONN Board (P/R Auto supply, multi option)
CONN Board (HMDS auto supply, multi option)
Assy boards
WEE Lamp stage assy (Lamp, Stage overhaul test)
Thermo controller (P/N: INR 244-112 T)
AC Power box
T&H Controller assembly
C/S Unit frame
4 C/D FFU Frame
Pillar frame
C/S Unit AC 100 V, FFU Filter
M/A FFU Filter.
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