二手 SHINCRON RAS-1100C #9070465 待售

Radial assisted sputtering system Spare parts: Gate valve shield plate Substrate holder (drum) shield plate Target material shield plate Sputtering source shield plate Chamber liner Spare hard disk drive Components: (2) Moving carts with drum station for maintenance Drum substrate holder and blank substrate (36 sided) Bellow tube for the exhaust Operation Manuals (2) Work tables exchanging target materials 1000mm (W) x 1000mm (D) x 500mm(H) (2) Gas introducing devices Gate valve shield plate Rotary shaft for substrate holder (drum) and shield plate Shield plate for target materials Shield plate for sputtering source Chamber liner Attached targets: (6) Nb sets (9) Si sets Utilities: Power: 200V +/- 10%, 3 phase, 50/60 Hz Leakage Detecting 100mA Grounding Resistance <10 Ohm Capacity: 60 kW Connection: Terminal stand (M8) Water: Pressure: Inlet 0.3-0.4MPa, Outlet <0.1MPa, Differential Pressure >0.3MPa Temperature: 18-24°C Quality 5ohm cm (approx) Capacity: 100 L/min Connection: Inlet Rc2, Outlet Rp2 Compressed air: 0.5-0.7 MPa Capacity: 400 NL/min Connection: Rc3/8 Utility Gas: Ar 0.05-0.2 MPa, 1500 sccm capacity, 1/4" Swageloc connection O2 Max 0.3 MPa, 500 sccm capacity, 1/4" Swageloc connection Tubes: Metal Made, Grounding Resistance <100 ohm, D Class Grounding Capacity: 50 m^3/hr Connection: VG80 2007 vintage.