二手 DNS / DAINIPPON SSW-60A-AR #293689357 待售
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ID: 293689357
晶圓大小: 6"
Spin scrubber, 6"
Non-SMIF Type
Loading position type: Left side
No GEM Controller
3-Colors signal tower
(2) Reverse units
Indexer unit:
Type: (4) Cassette
Wafer defect sensor and vaccumless A type
Transfer robot
TR Unit:
Dual arm transfer robot
Wafer defect sensor
Back-side spin unit:
Mechanical chuck
Brush nozzle
DIW1, DIW2, Back rinse, Brush rinse, N2 Blow and N2 Purge
Front-side unit:
Vacuum chuck
Brush nozzle
Jet nozzle
DIW1, DIW2, Back rinse, Jet rinse, N2 Blow and N2 Purge
Side cabinet:
Jet pump
Meghcon cabinet
R/D Rack
Missing parts:
Servo AMO
5-Axis drive
T/R Board
2000 vintage.
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