二手 ASML PAS 5500 / 700D #293744020 待售

Stepper, 8" Fab section: Lithography CIM: SECS Process: BEOL Handler system Factory interface DONALDSON Cabinet C and T cabinet Transfer former Cymer laser ACC Unit Illumination: 26 x 8 mm, <1.4, 0.67 Intensity: >2400, 2143.31 Samos block size: 33 µm, <5.5, 5.67 Dynamic focal: Height of element: -2< x <2, 0.58906 Image tilt ray: 1< x <1, 0.87637 Best focus, -0.06< x <-0.06, 0.001 Overlay: Single machine overlay: X<35: 8.5 nm Y<35: 13.5 nm Lens data: FPD: 0.094 µm AST: 0.060 µm 2000 vintage.