二手 ASML Twinscan AT 1100B #293652583 待售
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ID: 293652583
晶圓大小: 8"-12"
優質的: 2003
ArF Scanner, 8"-12"
193 nm
STARLITH 1100 Lens 4x
(2) Reticle SMIF pods, 6"
Throughput: >60 WPH
Scan field: 26 x 32 nm
Conventional illuminator: 0.85 - 0.33
DOE Turret illuminator with quasar
CYMER NANOLITH 7000 Series ArF laser, 20 W
SUN SPARC Remote workstation
Chemical extraction system
FSI / TEL / TOKYO ELECTRON Polaris 3500 Tracking interface
SECS I
SECS II
Annular
2003 vintage.
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