二手 ASML XT 1250 #9191912 待售
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已售出
ID: 9191912
晶圓大小: 8"
Stepper, 8"
Wafer type: Notch
Laser model: GIGAPHOTON GT42A4 (20W)
Laser type: GIGAPHOTON Laser
FAT Attendance
OIU / Reticle wafer aux port: Left configuration
CSR's for XT1250B various: CSR 7603
FOUP Machine door sensor: No
PPD IRIS (CSR): No
CSR (AT Multilingual UI): No
Pellicle safeguard (CSR): No
CSR (LS M2M P2P): No
Active contrast control: No
Quasar: No
WH Carrier interface: (25) Wafers open cassette kit
Wafer track interface: SOKUDO RF3/200
Mark sensor
Integrated reticle library: No
IRIS-6 Inch reticles twinscan: No
DOE ID12 Low sigma
DOE MP2 35-X: No
DOE MP2 35-Y: No
DOE ID5 MP4 30-45: No
DOE ID2 MP4 20-45: No
Reticle CIDRW (Tag reader): No
FOUP Lockout system: No
DOE ID6 High sigma
Chuck dependent correction (CSR): No
Image streaming: Standard
Second laser paddle: No
CD-FEC: Standard
Lithoguide ILIAS: Standard
Wafer ID reader: No
MDL View: Site view
Athena narrow marks: Standard
Reticle barcode reader
Focus spot monitor: Standard
Reorder lot service: No
UNIVERSAL Prealignment: No
Recipe creator
Quasar XL: Standard
Automated reticle transport: No
Lot overhead reduction: LOR-2 / Standard
Machine specification for SWkey: B
Quasar XL: Standard
Dose mapper: Standard
Top package: Standard on XT:1400 (Top 2)
PEP for AT 1200B: No PEP package
DOE ID28 MP5 Soft quasar: No
DOE ID18 MP2 40-Y: No
DOE ID19 MP2 40-X: No
DOE ID31 MP4 40-45: No
DOE ID14 MP4 60-45: No
DOE ID21 MP4 45: No
EFESE: No
CSR L1L7 Type_1: No
ASF LS area extension: No
DOE ID9 MP4 20: No
IRIS Feature scan: No
Reticle shape correction
Twinscan wafer switch
DOE ID8 MP2 90-X: No
DOE ID7 MP2 90-Y: No
DOE ID13 MP4 30: No
PupMeas with ILIAS: No
CSR Proximity matching: No
ExpoSure: No
NA Extension / Diaphragm limiter: No
DOE ID29 MP2 60-X: No
DOE ID30 MP2 60-Y: No
Chemical sampling ports: No
ASF (LS Spot Coverage): No
System perf indicators focus: No
Equipment constants: No
BAM (Bandwidth analysis module): No
DOE ID20 Ultra low sigma: No
2D Barcode reader: No
ASF (E-chuck Flatness Qualification): No
Wait watcher: No
Reticle streaming: No
Best uniformity settings (BUSS): No
Grid mapper
Chuck dedication: No
Spot less: No
Module name Last value Status Unit Limit
Total shot 15825.9 - Mpulse -
Chamber 4344.8 36% Mpulse 12000
L/N Module 4345.9 31% Mpulse 14000
Fronut mirror 2260.7 16% Mpulse 14000
Monitor module 7443.7 74% Mpulse 10000
HG Lamp 6113 3% Cycle 200000
F2 Trap (C) 96.62 97% Cycle 100
F2 Trap (T) 5789.8 33% Hour 17520
Excimer shutter 356890 12% Cycle 3000000
Power: 400 V.
ASML XT 1250是半導體工業中用於光刻的晶圓步進器。ASML XT1250具有許多先進的技術,設計用於在圓形晶片表面上制造極其精確的圖案。XT 1250使用「雙場光學」,允許在打印過程中在蒙版和晶片之間進行極其精確的對準。這項技術在晶圓上提供了亞微米分辨率的特性。它還配備了獨特的多渠道幹涉儀,提供對線性距離的極其精確的測量。XT1250由世界上最快的多CPU平臺apexengine提供動力。這使得大晶片能夠快速和高分辨率地打印。它也可以配置為處理不同的應用,從較小的晶圓到較大的設備。Apexengine允許更快的生產周期、更高的吞吐量和更好的均勻性。ASML XT 1250具有動態聚焦補償系統(DFCS),有助於在打印過程中保持聚焦精度。DFCS技術減少了手動重新聚焦的需要,並保證了穩定的圖樣打印。機器的Specifier/Revealer軟件允許在晶片上定制圖案。此軟件可以調整字段位置以創建均勻、精確的模式,還可以幫助保存數據而不會丟失分辨率。ASML XT1250還具有ProFlux解決方案,可確保向晶圓表面提供最佳通量。這種創新的方法可以提高晶片的蝕刻速率,而不會影響模式的質量。此外,ProFlux配置可為每個作業支持多個晶片,從而節省制造商的時間和金錢。XT 1250是一款先進的晶圓步進器,提供制造商先進的解決方案和強大的性能。它為晶片上的微小特征打印提供了無與倫比的精度、準確性和可靠性。機器的高吞吐量,加上其先進的軟件解決方案,使XT1250成為尋求減少設計時間同時提高產量和吞吐量的半導體制造商的理想解決方案。
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