二手 ASML XT 1950Hi #293752405 待售

Lithography system, 12" (2) Load laser ports Hard Disk Drive (HDD) Immersion lithography with size:193 nm Resolution capability: 38 nm Overlay: 4 nm SMO / 7 nm MMO Throughput: 148 WPH (12" wafer with 125 exposures at 30 mJ) CYMER XLR-560i 193 nm 60 W/6 kHz Laser with E95 Bandwidth monitoring Semi compliant MENV and FIMS Assembly Controls: UNIX / SUN Architecture AERIAL XP P-type Illumination system Alignment: Blue align with narrow mark Focus and Field-by-field levelling Focus spot monitoring Circuit Dependent Focus Edge Clearance (CD-FEC) Dual E-chucks (Bonded SiC) LS-MATCH2 (XT) Image streaming Overhead reduction: 1 and 2 Productivity Enhancement Package (PEP) In-situ metrology: Sensor module ILIAS Lithoguide (SAMOS and PUPICOM) UNICOM XT Dose mapper ArF (15) QUASAR XL Slots Reticle shape correction 2DE Grid calibration Twinscan Overlay package Water cooling for electronics cabinet IRL-XP Integrated reticle library for H-SPEC Systems IRIS-XT Integrated reticle inspection system Reticle streaming Spotless G & H Twinscan Grid mapper TEAL PCDU-XT1900 Distribution unit FSM flex package Aux port 300 mm FOUP / 25 Wafers XCDA Gas purification system Purifier canister: Optics series, 10 MH, SS Reticle with defect: 40 nm SMASH XY Power conditioner: 135 kVA XCDA Gas purification system bypass manifold: Manifold three valve: 10 m Filter housing: Cabinet ESI EX2600 Filter set Standard and compliance: CE Marked S2 Compliant Manual Laser power: 60 W Throughput: 148 WPH ZEISS Starlight: 1950 2010 vintage.