二手 ASML XT 1950Hi #293802187 待售

Lithography system, 12" Load ports laser Hard Disk Drive (HDD) Immersion lithography: 193 nm Resolution capability: 38 nm Overlay: SMO: 4 nm MMO: 7 nm Throughput: 148 WPH CYMER XLR-560i Resolution: 193 nm Laser: 60 W / 6 kHz with E95 Bandwidth monitoring Controls: UNIX / SUN Architecture Aerial XP Illumination system P type: Illumination alignment Alignment: Blue align with narrow mark Focus and Field-by-field levelling Focus spot monitoring Circuit Dependent Focus Edge Clearance (CD-FEC) Dual E-Chucks LS-MATCH2 (XT) Image streaming Overhead reduction: 1 and 2 Productivity Enhancement Package (PEP) In-situ metrology: Sensor module UNICOM XT: Dose mapper ArF (15) QUASAR XL Slots Reticle shape correction 2DE Grid calibration Twinscan overlay package Water cooling for electronics cabinet Integrated Reticle Library (IRL-XP) for H-SPEC Systems Integrated Reticle Inspection System (IRIS-XT) Reticle streaming: Spotless G and H Twinscan Grid mapper TEAL PCDU-XT1900 Distribution unit FSM flex package Aux port 300 mm FOUP / 25 Wafers Reticle with defect: 40 nm SMASH XY ZEISS Starlight: 1950 XCDA Gas purification system: Purifier canister: Optics series, 10 MH, SS XCDA Gas purification system bypass manifold: Manifold 3 Valve: 10 m Filter housing Cabinet ESI Vaporsorb: EX2600 Filter set Throughput: 148 WPH CE Marked Laser power: 60 W Power conditioner: 135 kVA.