二手 CANON FPA 2500 i3 #293749144 待售

Stepper Accuracy: 0.4 µm Auto focus repeatability: 3 Sigma ≤ 0.12µm Die by die levelling repeatability: 3 Sigma ≤ 10ppm Mechanical alignment accuracy: 3 Sigma ≤ 40µm Lens performance: Resolution: ≤ 0.40µm Depth of focus: ≥ 0.8µm Image field deviation: R ≤ 0.55µm Distortion (including mag.): ≤ 0.07µm Illumination: Intensity (1.5 kW input): ≥ 550 mW/cm² Uniformity: ≤ 1.2% Light integrator accuracy: ≤ +1.2% Masking blade accuracy: ≤ +100µm Alignment: Reticle rotation accuracy: ≤ +0.02µm Reticle rotation repeatability: R ≤ +0.03µm AGA HeNe TV Alignment: lml+3sigma ≤ 0.10µm AGA B2 TV Alignment: lml+3sigma ≤ 0.10µm XY Stage: Stepping accuracy: 3 Sigma ≤ 0.06µm Scaling: ≤ +1.0 ppm Orthogonality: ≤ +1.0 ppm Throughput: Left inline: Levelling off: 6" (45s) ≥ 62/hr 8" (78s) ≥ 44/hr Levelling on: 6" (45s) ≥ 57/hr 8" (78s) ≥ 40/hr Right inline: Levelling off: 6" (45s) ≥ 61/hr 8" (78s) ≥ 44/hr Levelling on: 6" (45s) ≥ 56/hr 8" (78s) ≥ 40/hr Reliability: Reticle running and wafer running.