二手 CANON FPA 6000 AS4 #293752740 待售
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ID: 293752740
晶圓大小: 8"
優質的: 2004
ArF Scanner, 8"
CYMER Laser
Reticle, 6"
Cassette: Left
SCSI Hard Disk Drive (HDD)
Wafer loader type: SCH Robot
Reticle alignment: EXA Scope unit
Chamber type: FPA-6000-ASA
CCD
Autofocus mode
Non-functional parts:
CYMER Chamber (MO / PA)
Reticle changer robot arm
Reticle pre-align stage
PC: HP B2600
2004 vintage.
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