二手 GCA ALS #293639853 待售

I-Line wafer stepper Illumination uniformity: <= 2.5% Maximum stage travel: 200 mm System resolution: 0.65 μm L/S Depth of focus: >= 0.98 μm Reduction: +/- 0.10 µm Rotation: <= 0.05 µm Telecentricity: +/- 0.5 ppm Global registration: +/- 0.30 µm T.I.R Local registration: +/- 0.15 µm T.I.R Open frame: No repeaters Orthogonality: +/- 1.0 ppm Stage precision: +/- 0.15 µm Wafer levelling repeatability: +/- 10 ppm Reticle aligner accuracy: <= 0.1 µm Aperture blade repeatability: +/- 0.25 mm Aperture blade skew: +/- 0.25 mm RMS Realiability: 30 Cycles AWH Precision: +/- 3.0 mils AWH Reliability: 50 wafers Focus repeatability: <= 0.30 µm T.I.R Reduction repeatability: <= 6.0 ppm T.I.R Optic: Lens specification: 2145-I Tropel Focal length: 86 Resolution: 0.65 µm Image field: 24.1 mm Wavelength: 365 mm E.P Diameter: 49 mm E.P. Location: 473 mm Reduction: 1:5 Depth of focus: n+/- 0.5 µm.