二手 NIKON NSR 2205 i12C #293603489 待售

i-Line stepper Lens distortion: Standard measurement Reticle blind setting accuracy Focus calibration repeatability: 20 times measurement Exposure power (N.A=0.57): Mercury lamp Integrated exposure control accuracy (N.A=0.57): i-line IR-Radiance meter Alignment accuracy FIA: FIA-EGA (Standard measurement) Alignment accuracy LSA: LSA-EGA (Standard measurement) Array orthogonality: Standard measurement Stepping precision: Standard measurement Wafer pre-alingnment repeatability: Single wafer, 20 times measurement Illumination uniformity (N.A=0.57): 5 times measurement within the exposure area Resolution, 0.4 µm: L/S Conv NA: 0.57 CE V/H: 0.40 PR Film thickness: <1.0 µm DOF: 0.45 µm: 5-Points V/H: 0.40 µm PR Film thickness: <1.0 µm CD Uniformity, 0.45 µm: 5-Points V/H: 0.40 µm PR Film thickness: <1.0 µm Coma, 0.45 µm: 5-Points V/H: 0.40 µm PR Film thickness: <1.0 µm Total Focus Deviation (TFD), 0.45 µm: L/S Conv N.A: 0.57 Standard measurement Astigmatism (AST): Deviation L/S Conv Standard measurement Lens inclination, 0.50 µm: L/S Conv N.A: 0.57 Standard measurement Lens control accuracy (Initial): Heating: 150 min Cooling: 180 min Operation test: Wafer system Reticle.