二手 NIKON NSR SF120 #9227511 待售

i-Line stepper, 8"-12" Inline with ACT 12 Magnification: 1/4 Reduction Light source: i-Line (365 nm) Resolution: 0.28 µm Variable lens NA: 0.50~0.62 Exposure filed size: 25-33 mm Lens adjust: PIEZO (3-Axis) PC Hardware: DS10 Type UPS Reticle size: 6" SIMF Variable reticle microscope Alignment sensor: LSA FIA AIS Interferometer system: Wafer stage Reticle stage Multi focus system Table leveling (VCM) Wafer loader: Type3 Notch Wafer cassette Front In-line (FOUP) + ACT 12 NC PRE2 Reticle loader: SMIF Type (OHT) (2) Indexers Barcode reader Particle checker (PPD3) Control rack: Right type Normal cable length Chamber: Sendai chamber S52 CVCF NEMA Electrical power: 208 V, 60 Hz, 3-Phase BATC / CATC / LLTC: 23° Options: Front In-line FOUP TRANS Power unit Lamp cooling unit illumination system: ID1(L-NA/I-NA): (Con V 0.52/0.36) ID2(L-NA/I-NA): (ANN 0.62/0.5) ID3(L-NA/I-NA): (Con V 0.62/0.43) ID4(L-NA/I-NA): (Con V 0.62/0.36) Wafer flatness: Maximum-Minimum: 1.580 µm L.F Maximum: 0.440 µm Lamp uniformity: Power: 1224.687 mw/cm² Uniformity: 0.780% Lens distortion: Minimum - maximum: X: -0.012 - 0.013 µm Y: -0.017 - 0.016 µm Lens inclination: Maximum-minimum: 0.124 µm Curvature: 0.041 µm AST(V-H): 0.051 µm UR-LL: 0.026 µm UL-LR: 0.002 µm Illumination power source: 5.0 kW Mercury ARC lamp 2003 vintage.