二手 NIKON NSR-TFH i14 DL #293689546 待售

Stepper, 6" (2) Cassettes Left-in-left Reticle, 6" (normal type) 30-Slots Barcode reader Magnification: 1/5 Reduction Light source: i-Line (365 nm) Resolution: 0.4 µm Variable lens: 0.50-0.63 Exposure filed size: 22 mm SENDAI S25 Air conditioner and temperature controller HFC-R407C / FC-77 Refrigerant Control: Bellows Lens adjust: Micrometer Reticle microscope: Variable Alignment sensor: LSA, FIA, TTLFC2 Lamp: 2.5 kW Multiple focus system Table leveling Wafer type: Notch (type 3) Wafer holder type: Ring Pre-align type: NC PRE2 No wafer edge exposure No particle checker Control rack: Left type Cable type: Normal Missing parts: WL Robot arm (2) WL3CR PCB LC Bellows unit (2) Anti-vibration tables Hard Disk Drive (HDD) (DKA0, DKA100) PC Type: HP Alphaserver DS15A Power supply: 200/208 V, 3 Phase, 50/60 Hz 2008 vintage.